Semiconductor Energy Laboratory Co., Ltd.

Yuji Tanamura

Shunpei Yamazaki

Kazuo Urata

Mamoru Tashiro

Shinji Imato

Shigenori Hayashi

Takashi Inujima

Kenji Itoh

Naoki Hirose

Seiichi Odaka

Thin film formation method

A mercury-vapor lamp is provided with a reservoir in which a superfluous amount of mercury is stored in the form of liquid state. The liquid mercury in the reservoir is cooled to a certain temperature. The pressure of mercury-vapor is automatically reduced to the saturated pressure of the liquid mercury cooled. In this configuration, the pressure of mercury-vapor is controlled by adjusting the temperature of the liquid mercury stored in the reservoir.

Gas discharge lamp having temperature controlled, liquid reservoir for

Ultraviolet light is emitted mainly with 185 nm in wave length so that a thick silicon layer is fabricated by decomposition of silane gas at a high deposition speed. As a light source, a bulb is filled with an amount of mercury gas without dosing argon gas which enhances preferentially light with 254 nm in wave length.

Ultraviolet light emitting device and application thereof

Growing community of inventors

Machida, Japan

Yuji Tanamura