Canon Kabushiki Kaisha

Yuji Sudoh

Ryuichi Ebinuma

Masao Kosugi

The present invention provides a supporting device that supports an optical element, comprising: a first supporting member that is fixed to an outer circumference of the optical element; a plurality of members that is connected to an outer circumference of the first supporting member; and a second supporting member that supports the first supporting member via the plurality of members, wherein each of the plurality of members is configured such that the a rigidity thereof in a first direction inclined relative to a direction orthogonal to an optical axis of the optical element in a plane including the optical axis is lower than a rigidity thereof in each of two directions that are orthogonal to the first direction and that are orthogonal to each other.

Supporting device, optical apparatus, exposure apparatus, and device manufacturing method

A support mechanism for supporting an optical element includes a first support member for supporting the optical element, a second support member coupled to the first support member via an elastic member, and a forcing member for applying a force to the elastic member to adjust a position and/or an orientation of the optical element.

Support mechanism, exposure apparatus having the same, and aberration reducing method

A holding mechanism for holding an optical element includes a rear side block that includes a rear side holding engagement part that is engageable with a rear side engagement part provided on a rear side of an optical element, a front side block that is coupled with the rear side block and includes a front side holding engagement part that is engageable with a front engagement part provided on a front side of the optical element or the holding member, wherein one of the rear side engagement part and the rear side holding engagement part has a groove and the other has a spherical part that has an at least partially spherical shape engageable with the groove, and wherein one of the front side engagement part and the front side holding engagement part has another groove, and the other has another spherical part that has an at least partially spherical shape engageable with the other groove.

Holding mechanism, optical apparatus and device manufacturing method

A retainer includes a plurality of support members for supporting an optical element, and a plurality of elastic members arranged between the plurality of support members, each elastic member applying an elastic force to the optical element in a direction perpendicular to a gravity direction.

Retainer, exposure apparatus, and device fabrication method

A correction member for correcting a gravity deformation of an optical element includes a first unit for applying an elastic force to the optical element substantially in an anti-gravity direction, and a second unit, arranged opposite to the first unit through the optical element, for applying an elastic force to the optical element substantially in a gravity direction.

Correction member, retainer, exposure apparatus, and device fabrication method

A lens barrel includes an optical element having a light-transmissive surface which is deformed by its own weight and/or by being supported, and a plurality of protrusive parts which support the optical element. The plurality of protrusive parts are disposed in such a way as to enable the light-transmissive surface of the optical element to be deformed symmetrically with respect to a plane which includes an optical axis.

Lens barrel and projection aligner

A lens barrel includes an optical element having a light-transmissive surface which is deformed by own weight thereof and/or by being supported, and a plurality of protrusive parts which support the optical element. The plurality of protrusive parts are disposed in such a way as to enable the light-transmissive surface of the optical element to be deformed symmetrically with respect to a plane which includes an optical axis.

Lens barrel having deformed optical element, and projection including same

A projection and exposure apparatus includes an optical member, a holding member for holding the optical member with a gap between the optical member and the holding member, and a powder charged in the gap between the optical member and the holding member, such that the optical member and the holding member are maintained in a spaced-apart relationship.

Growing community of inventors

Hadano, Japan

Yuji Sudoh