Ebara Corporation

National Aerospace Laboratory, Ebara Research Co., Ltd.

Yuji Shirao

Rikiya Nakamura

Yoshiro Takemura

Takeshi Tsuji

Kohtaro Kawamura

Kazutaka Okuda

Yoichi Kanemitsu

Tetsuo Komai

Keiichi Ishikawa

Tomonori Ohashi

Tadakazu Nishikawa

Yasutaka Muroga

Kotaro Kawamura

Hiroyuki Yamada

Norio Kimura

Yoshihiro Ueda

Hiroyuki Shinozaki

Mamoru Suzuki

Yukio Ikeda

Atsushi Nakajima

Satoshi Mori

Toshiharu Nakazawa

Masayoshi Hirose

Katsuyuki Aoki

Hiroshi Aono

Yoshio Sato

Masao Matsumura

Minoru Takizawa

Katsuaki Usui

Yasuhiko Suzuki

Yoichi Mori

Kazuyuki Kasahara

Shunichi Aiyoshizawa

Toyoji Shinohara

Fumio Kondo

Eishi Marui

Chikara Murakami

Daisuke Konno

Takeshi Yoshioka

Takashi Kataoka

Masaaki Kajiyama

Hiroyuki Chino

Masaru Nakaniwa

Masato Eguchi

Hideo Tsuboi

Yoshio Takemura

An apparatus for treating an exhaust gas that includes a pre-treatment section that removes a powdery component, a water-soluble component or a hydrolytic component from the exhaust gas. The exhaust gas contains a fluorine compound and CO. A heating oxidative decomposing section performs heating oxidative decomposition of at least one of the fluorine compound and CO to detoxify the exhaust gas. The apparatus also has a post-treatment section for post-treating an acid gas such as HF which has been produced by the heating oxidative decomposition.

Method and apparatus for treating exhaust gas

A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.

Combustion type waste gas treatment system

The present invention provides a burner for use in a combustion-type waste gas treatment system for combusting waste gases emitted from semiconductor manufacturing system, particularly, a deposition gas containing SiHand a halogen-base gas, simultaneously at a high efficiency of destruction, making it difficult for a powder of SiOto be attached and deposited, performing a low-NOx combustion, and maintaining a desired level of safety. The combustion-type waste gas treatment system has a flame stabilizing zone (), which is open toward a combustion chamber (), surrounded by a peripheral wall (), and closed by a plate () remotely from the combustion chamber. A waste gas, an auxiliary combustible agent, and air are introduced into and mixed with each other in the flame stabilizing zone (), and the mixed gases are ejected toward the combustion chamber () perpendicularly to the plate ().

Burner for treating waste gas

A waste gas treatment system having a burner part and a combustion chamber provided at a downstream side of the burner part. Combustion flames are formed from the burner part toward the combustion chamber, and a waste gas is introduced into the combustion flames, thereby oxidatively decomposing the waste gas. The combustion chamber is formed from an inner wall made of a fiber-reinforced ceramic material. Therefore, the wear of the inner wall due to heat and corrosion is minimized, and thermal stress cracking is also reduced. Consequently, the lifetime of the system increases, and the cost of equipment and the availability factor can be improved. In addition, because the inner wall exhibits no catalytic effect, the formation of thermal NOx is suppressed, and it is possible to achieve environmental preservation and to simplify the treatment equipment.

Exhaust gas treating device

A combustion type waste gas treatment system is capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.

A combustor for waste gas treatment having a flame stabilizing zone surrounded by a peripheral wall and closed with a bottom wall. The flame stabilizing zone is provided to face a combustion chamber. Burner ports for auxiliary combustible gas are provided in the peripheral wall to inject an auxiliary combustible gas into the flame stabilizing zone so as to produce swirling flows. Burner ports for waste gas are provided in the bottom wall to inject a gas into the flame stabilizing zone.

Combustor for waste gas treatment

A scrubber including a casing having an exhaust gas inlet and an exhaust gas outlet. An impeller is mounted in the casing, and the impeller is rotatable about its own axis. An exhaust gas can be introduced into the center of the impeller through the exhaust gas inlet of the casing. A cleaning liquid discharge nozzle is positioned at the center of the impeller for spraying a cleaning liquid in the impeller. Also, a baffle member is spaced apart from and surrounds the impeller. A mixture of the exhaust gas and the cleaning liquid exiting the impeller impinges on the baffle member. The cleaning liquid discharge nozzle is provided inside and rigidly connected to the impeller so as to rotate together with the impeller. The nozzle has a plurality of cleaning liquid discharge orifices extending radially through a cylindrical wall thereof to discharge a cleaning liquid into the impeller.

Scrubber

The present invention provides a burner for use in a combustion-type waste gas treatment system for combusting waste gases emitted from semiconductor manufacturing system, particularly, a deposition gas containing SiH and a halogen-base gas, simultaneously at a high efficiency of destruction, making it difficult for a powder of SiO to be attached and deposited, performing a low-NOx combustion, and maintaining a desired level of safety. The combustion-type waste gas treatment system has a flame stabilizing zone ( ), which is open toward a combustion chamber ( ), surrounded by a peripheral wall ( ), and closed by a plate ( ) remotely from the combustion chamber. A waste gas, an auxiliary combustible agent, and air are introduced into and mixed with each other in the flame stabilizing zone ( ), and the mixed gases are ejected toward the combustion chamber ( ) perpendicularly to the plate ( ).

Combustor for exhaust gas treatment

A combustor for waste gas treatment having a flame stabilizing zone surrounded by a peripheral wall and closed with a bottom wall . The flame stabilizing zone is provided to face a combustion chamber . Burner ports for auxiliary combustible gas are provided in the peripheral wall to inject an auxiliary combustible gas B into the flame stabilizing zone so as to produce swirling flows. Burner ports for waste gas are provided in the bottom wall to inject a waste gas A into the flame stabilizing zone

Combustor for treating exhaust gas

Magnetic levitation conveyor apparatus

A radial magnetic bearing apparatus suspends a rotating shaft and stably operates at a level exceeding a bending intrinsic vibration value of the rotating shaft by controlling magnetic forces generated by control coils wound around control magnetic poles. Grooves are provided on the surface of each control magnetic pole facing the rotating shaft, and sensor coils are wound to pass through the grooves in order to detect the position of the rotating shaft in the radial direction. A part of each control magnetic pole may be used as magnetic poles of an inductance-type displacement sensor.

Magnetic bearing apparatus

A spindle motor has a rotor supported by a stator through a thrust bearing and a radial bearing. At least the thrust bearing is a hydrodynamic bearing. The spindle motor is provided with a device for adjusting the thrust laod that is applied to the thrust bearing. The load adjusting device has an electromagnet that is provided on the stator and a permanent magnet that is provided on the rotor in opposing relation to the electromagnet. Either the repelling force or the attraction force, which acts between the electromagnet and the permanent magnet, is controlled by changing the current supplied to the electromagnet.

Spindle motor

An inductance-type displacement sensor which can measure the displacement of a measured object of magnetic material without any contact with the object. A pair of series connected coils is provided adjacent to the object so that the inductance of the coils varies in response to a displacement of the object from a predetermined position. The inductance, the number of windings, the direction of the windings and the section of each of the cores are so set that the magnetic flux produced by one of the coils runs in a direction opposite to that of the magnetic flux produced by the other coil and the densities of the respective magnetic fluxes are identical with each other.

Inductance-type displacement sensor for eliminating inaccuracies due to

A turbo molecular pump includes a magnetic bearing system which includes a rotor having an impeller connected to a shaft and a motor. A stator is positioned between the shaft and the impeller. Radial magnetic bearings, an active axial magnetic bearing and emergency bearings are each provided between the rotor and the stator. The radial magnetic bearings include passive magnetic bearings provided on the rotor and the stator respectively. The axial magnet bearing is disposed in the vicinity where the impeller is connected to the shaft. The emergency bearings are disposed on a low vacuum side with one emergency bearing being positioned near the axial magnetic bearing. A diameter of the shaft is made smaller than an inside diameter of the emergency bearing near the axial magnetic bearing. By this arrangement, only one control axis is necessary for controlling the position of the rotor. Disassembling of the shaft and impeller is easy and contamination of the high vacuum side can be prevented.

Turbo molecular pump

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Tokyo, Japan

Yuji Shirao