Honda Motor Co., Ltd.

Gotoh Educational Corporation

Yuji Mihara

Kenji Matsumoto

A thin film sensor includes an insulating layer provided on a surface of a measurement target, and a sensor layer that is laminated on the insulating layer, and includes a plurality of regions partitioned by a groove that is provided by irradiation of a laser and penetrates in a thickness direction. Among the plurality of regions, at least one region corresponds to a sensor region that senses a pressure applied to the measurement target or a temperature of the measurement target, and other regions each correspond to a non-sensor region that does not sense a pressure applied to the measurement target or a temperature of the measurement target.

Thin film sensor

A capacitive distance sensor includes a first guard electrode, a conductor, a second guard electrode, and insulators. The conductor includes a sensor electrode and a lead portion and is arranged on a side of a measurement target with respect to the first guard electrode. The second guard electrode is arranged on the side of the measurement target with respect to the conductor. The first guard electrode includes portions overlapping the sensor electrode and the lead portion. The second guard electrode includes a portion overlapping the lead portion and does not overlap the sensor electrode.

Growing community of inventors

Tokyo, Japan

Yuji Mihara