Ebara Corporation

Ckd Corporation

Yuji Matsuoka

Nobuharu Noji

Tetsuro Sugiura

Norihiko Nomura

Hiroaki Ogamino

Yoji Mori

Hiroshi Kagohashi

Yasuhiro Niimura

Hiroshi Hattori

Akira Murakumo

Hiroshi Kino

An evacuation system having a long service life, a compact configuration and high reliability is disclosed. The system enables the process gases to be reused, so that the overall costs of capital investment and operation are reduced. The system comprises a processing chamber, and a vacuum pump communicating with the processing chamber by way of an evacuation conduit for evacuating the processing chamber. The evacuation conduit are provided with not less than two trapping devices arranged in series and operating at different temperatures for capturing different components contained in an exhaust gas discharged from the processing chamber.

Evacuation system

Exhaust switching unit

A trapping device is presented to improve production efficiency of vacuum processing devices. The trapping device comprises an exhaust path for evacuating process gas from a hermetic chamber through a vacuum pump; a regeneration path disposed adjacent to the exhaust path and comprising a regeneration means; not less than two trap sections communicable either with the exhaust path or with the regeneration path; and switching means for transposing the trap sections either to the exhaust path or to the regeneration path. A trapping operation and a regeneration operation can be performed concurrently respectively in the exhaust path and the regeneration path.

Trapping device

Growing community of inventors

Kakamigahara, Japan

Yuji Matsuoka