Denso Corporation

Yuji Kutsuna

Hajime Ito

Takao Tsuruhara

Mikio Sugiki

A gyro sensor having a vibrator and a start circuit generates an oscillation encouraging signal by boosting a first voltage to a voltage of the signal in response to a start signal of a start frequency sent from the start circuit. The vibrator is vibrated in response to the oscillation encouraging signal. When the vibrator is self-excited, the vibrator outputs a first detecting signal indicating an oscillating amplitude and oscillating frequency in the vibration of the vibrator. The sensor boosts the first voltage to a second voltage in response to the first detecting signal and generates a driving signal of a driving frequency and the second voltage. The self-excitation of the vibrator is continued in response to the driving signal. The vibrator outputs a second detecting signal indicating a yaw added to the vibrator. The sensor generates a sensor signal corresponding to the yaw from the second detecting signal.

Gyro sensor of an electrostatic driving and capacitance detecting type

In a method of manufacturing a semiconductor device, a semiconductor wafer is prepared that includes a plurality of IC chips, each having a circuit including a terminal for applying an electrical quantity to the circuit, and a switch electrically connected to the terminal. A wire is formed between adjacent IC chips to provide a parallel or series electrical connection between the terminals of the IC chips via the switch. A test is performed to determine the operability (defective or non-defective) of each of the IC chips. The switch is then operated to provide an electrical connection between the terminals of only those IC chips that were determined to not be defective and the wire. A conduction test is performed on the circuits of the IC chips through the wire.

Semiconductor wafer and semiconductor device manufacturing method using the same

The gyro sensor uses a clock signal as a timing signal or synchronous signal for reading various data stored in a built-in memory for its yaw rate sensing operation. The gyro sensor is configured to use, as such a clock signal, the self-excited oscillation signal being applied to the vibrator of the gyro sensor as a vibrator drive signal.

Growing community of inventors

Oobu, Japan

Yuji Kutsuna