Seiko Epson Corporation

Epson Toyocom Corporation

Yuji Hamayama

Makoto Furuhata

Akinori Yamada

Takashi Yamazaki

Hiroki Kawai

A flexural vibration piece includes a flexural vibrator that has a first region on which a compressive stress or a tensile stress acts due to vibration and a second region having a relationship in which a tensile stress acts thereon when a compressive stress acts on the first region and a compressive stress acts thereon when a tensile stress acts on the first region, and performs flexural vibration in a first plane. The flexural vibration piece also includes a heat conduction path, in the vicinity of the first region and the second region, that is formed of a material having a thermal conductivity higher than that of the flexural vibrator and thermally connects between the first region and the second region.

Flexural vibration piece and oscillator using the same

A flexural vibration piece including a vibrator having a first region on which a compressive stress or a tensile stress acts and a second region on which a tensile stress acts when a compressive stress acts on the first region and a compressive stress acts when a tensile stress acts on the first region, and performs flexural vibration in a first plane; and a heat conduction path formed of a material having a thermal conductivity higher than the vibrator and that thermally connects the regions, wherein when m is the number of heat conduction paths, &#x3c1;is the thermal resistivity of the heat conduction path, &#x3c1;is the thermal resistivity of the vibrator, tis the thickness of the vibrator in a direction orthogonal to the first plane, and tis the thickness of the heat conduction path, a relationship of t&#x2267;(1/m)&#xd7;tv&#xd7;(&#x3c1;/&#x3c1;) is satisfied.

A flexural vibration piece includes a base, and a vibrating arms extending therefrom, each pair of vibrating arms has a first groove formed in the extension direction of the vibrating arm in one main surface following the direction in which the pair of vibrating arms are aligned, and a second groove formed side by side to the first groove in another main surface, the sum of the depths of the first and second groove portions is greater than the interval between the one main surface and the other main surface, and a mass portion is provided on each of the pair of vibrating arms, on the one main surface which is the opening side of the first grooves formed toward the outer sides opposite the inner sides on which the vibrating arms face each other.

Growing community of inventors

Tokai, Japan

Yuji Hamayama