Keyence Corporation

Yuji Akishiba

Takashi Atoro

Tatsuro Homma

To provide an optical-scanning-height measuring device capable of reducing an unmeasurable region on the surface of a measurement object. Light emitted from a light emitting section is deflected by a deflecting section according to designation of a measurement point. Measurement light is sequentially irradiated on a plurality of portions P in a partial region PA including or surrounding a part of a measurement object S corresponding to the measurement point. A deflecting direction of the deflecting section corresponding to the partial region PA or an irradiation position of the measurement light corresponding to the partial region PA are detected by a detecting section.

Optical-scanning-height measuring device

To provide an optical-scanning-height measuring device capable of quickly and highly accurately measuring the height of the surface of a measurement object while being compactly configured. In order to obtain interference light appropriate for calculation of height, an optical path length of the reference light is adjusted in the reference section. Movable sectionsandsupported by a supporting sectionmove on linearly extending two linear guides, whereby the optical path length of the reference light changes. When the optical path length of the reference light is adjusted, the movable sectionsandare moved in opposite directions each other.

To provide a shape measuring device capable of measuring a surface shape of a measuring object at high speed and with high accuracy in a wide measurement range while configuring the shape measuring device compact. A movable sectionand a balancing sectionare supported by a supporting sectionand reciprocatingly moved by a driving unitwith respect to the supporting sectionin opposite directions each other.

Shape measuring device

An optical displacement gage includes the phase determining unit includes a relative phase deciding unit to decide a relative phase of the frequency component within a range of 360 degrees, an absolute phase computing unit to compute an absolute phase by combining the relative phase based on the decision result by the relative phase deciding unit and the past decision result by the relative phase, and a phase reference updating unit to update a reference point of the absolute phase based on a reset instruction, and the displacement amount deciding unit decides the displacement amount based on the absolute phase.

Optical displacement gage

A displacement gauge comprises an objective lensthat projects light onto a measurement subject, an exciting portion that vibrates the objective lensat a preset amplitude along an optical axis direction of light passing through the objective lens, a position detector for detecting the position of the objective lens, an objective lens scan portionfor scanning the objective lensalong a plane orthogonal to the optical axis direction, an objective lens movement detecting portionfor detecting the moved position of the objective lens, an operation processing portionfor calculating a distribution of displacement amount within a measuring area, based on the positional information of the objective lenswithin the measuring area detected by the objective lens movement detecting portion, and the displacement amounts measured at plural measuring points, and an output portionfor outputting the result of calculation by the operation processing portion

Displacement gauge and displacement measuring method

A collimator lens converts a light transmitted from a light source into an almost parallel light. A light receiving lens receives the almost parallel light including a shadow of a measurement object . A one-dimensional image sensor receives a light passing through a diaphragm . A two-dimensional image sensor receives a light split by a beam splitter through a second diaphragm . A signal processing section obtains an outside dimension and a monitor image of a measured portion of the measurement object by processing electric signals sent respectively from the image sensors and . A display section displays the outside dimension and the monitor image of the measured portion of the measurement object

Growing community of inventors

Osaka, Japan

Yuji Akishiba