Rigaku Corporation

Yuichiro Shimizu

Takashi Yamada

An X-ray fluorescence spectrometer includes: an X-ray source () to irradiate, with primary X-rays (), a sample () that is multiple nanoparticles placed on a substrate (); an irradiation angle adjustment unit () to adjust an irradiation angle at which a surface () of the substrate is irradiated; a detection unit () to measure an intensity of fluorescent X-rays () from the sample (); a peak position calculation unit () to generate a sample profile representing change of the intensity of the fluorescent X-rays () against change of the irradiation angle, and to calculate a peak irradiation angle position; a particle diameter calibration curve generation unit () to generate a calibration curve; and a particle diameter calculation unit () to calculate a particle diameter of nanoparticles of an unknown sample () by applying the peak irradiation angle position of the unknown sample () to the calibration curve.

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Takatsuki, Japan

Yuichiro Shimizu