Canon Kabushiki Kaisha

Yuichiro Miki

Ryo Nawata

Shota Takami

A motion control apparatus includes a first movable part, a second movable part, a first measurement device for measuring a motion of the first movable part, a first compensator for generating a first manipulated variable based on an output from the first measurement device and a target value for controlling the motion of the first movable part, a generator for generating an observed value concerning a relative motion between the first movable part and the second movable part, a second compensator for generating a second manipulated variable based on the observed value, and a calculator for generating a manipulated variable for driving the first movable part based on an output from the first compensator and an output from the second compensator. For the second compensator, a parameter value for generating the second manipulated variable is decided by machine learning.

Motion control apparatus, lithography apparatus, planarization apparatus, processing apparatus, and article manufacturing method

The feedback control device takes information regarding a control deviation between a measured value and a target value of a controlled object as input, and outputs a control amount for the controlled object; comprising:

Feedback control device that suppresses disturbance vibration using machine learning, article manufacturing method, and feedback control method

A display device is constructed with conductive fibers which are coated with a display medium and are woven together with transparent conductive fibers. The conductive fibers coated with a display medium serve as warps and the transparent conductive fibers serve as wefts. The display device is not provided with an external electrode and is therefore flexible like plain cloth.

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Kanagawa, Japan

Yuichiro Miki