Asahi Glass Company, Limited

Yuichiro Ishibashi

Yasushi Matsumura

Naoko Shirota

Masahiro Ito

Takeshi Eriguchi

Ikuo Matsukura

Kaori Tsuruoka

Hiromasa Yamamoto

Shinji Okada

To deprotect an alcoholic hydroxyl group protected by a t-butyldimethylsilyl group without influencing a functional group unstable to an acid. In the presence of a solvent, an alcohol having a hydroxyl group protected by a t-butyldimethylsilyl group is deprotected in the presence of an acid or an acid salt having a pKa of from 1.0 to 3.0 in water.

Deprotection method for protected hydroxyl group

A useful fluoropolymer excellent in transparency and durability to a short wavelength light (an ArF excimer laser having an irradiation wavelength of 193 nm and a F2 excimer laser having an irradiation wavelength of 157 nm) as e.g. a pellicle material, wherein a polymer (I) to be used for a pellicle membrane and/or an adhesive is a polymer essentially containing the following fluorine atom-containing unit (1), wherein a chain forming the polymer main chain comprises a carbon atom and an etheric oxygen atom, at least one carbon atom forming the main chain is a carbon atom forming a cyclic group, and at least one etheric oxygen atom forming the main chain is an oxygen atom forming no cyclic group.

Pellicle and novel fluoropolymer

A crosslinkable fluorinated aromatic prepolymer which is capable of forming a cured product having high transparency, a low relative permittivity, high heat resistance, low birefringence and high flexibility, and which is obtained by subjecting a compound (Y-1) having a polymerizable double bond (A) and/or a phenolic hydroxyl group and a compound (Y-2) having a polymerizable double bond (A) and a fluorinated aromatic ring, to a condensation reaction in the presence of a HF-removing agent, with a particular fluorinated aromatic compound (B) and a compound (C) having at least 3 phenolic hydroxyl groups, the respective phenolic hydroxyl groups not being present in the same aromatic ring, and which has polymerizable double bonds (A) and ether bonds and has a number average molecular weight of from 1&#xd7;10to 5&#xd7;10.

Crosslinkable fluorinated aromatic prepolymer and its uses

Growing community of inventors

Chiyoda-ku, Japan

Yuichiro Ishibashi