Other

Yuichi Takano

Akio Harada

Masatoshi Yasutake

Yoshikazu Nakayama

Yoshiharu Shirakawabe

Takashi Okawa

Seiji Akita

A conductive probe for a scanning type microscope that captures the substance information of the surface of a specimen by the tip end of a conductive nanotube probe needle fastened to a cantilever, in which the conductive probe is constructed from a conductive film formed on the surface of the cantilever, a conductive nonatube with its base end portion being fixed in contact which the surface of a predetermined of the cantilever, and a conductive deposit which fastens the conductive nanotube by covering from the base end portion of the nonatube to a part of the conductive film. The conductive nonatube and the conductive film are electrically connected to each other by the conductive deposit.

Conductive probe for scanning microscope and machining method using the same

A scanning type microscope that captures substance information of the surface of a specimen by the tip end of a nanotube probe needle fastened to a cantilever, in which an organic gas is decomposed by a focused ion beam in a focused ion beam apparatus, and the nanotube is bonded to the cantilever with a deposit of the decomposed component thus produced. With this probe, the quality of the nanotube probe needle can be improved by removing an unnecessary deposit adhering to the nanotube tip end portion using a ion beam, by cutting an unnecessary part of the nanotube in order to control length of the probe needle and by injecting ions into the tip end portion of the nanotube.

Probe for scanning microscope produced by focused ion beam machining

A cantilever for a vertical scanning type microscope that obtains substance information of a surface of a specimen by a tip end of a nanotube probe needle fastened to the cantilever, in which the cantilever has a fixing region to which a base end portion of a nanotube serving as a probe needle is fastened, and a height direction of the fixing region is set to be substantially perpendicular to a mean surface of the specimen when the cantilever is disposed in a measuring state with respect to the mean surface of the specimen; and the base end portion of the nanotube is bonded in the height direction of the fixing region.

Growing community of inventors

Osaka, Japan

Yuichi Takano