Kabushiki Kaisha Toshiba

Yuichi Satoguchi

Tomiko Takano

Yuichiro Ozaki

Masayoshi Tazawa

Shoichi Harakawa

Etsuo Fukuda

Takeshi Asamura

Kazuyuki Miura

Koji Kitajima

Etsuo Fuduka

Kazuyki Miura

A flow conversion system for a manufacturing process includes a flow decomposition module decomposing a process in a target process flow into lower processes based on a process decomposition table to create an intermediate lower process flow; a compatible flow generation module replacing the lower processes with a lower compatible process based on a lower process compatibility table to create an intermediate lower compatible process flow; a flow check module creating a lower process flow including all the lower processes available in production facilities from the intermediate and intermediate lower compatible process flows based on an available process table; a flow selection module selecting the lower process flow by calculating an attribute based on an attribute definition table. An external storage unit stores the process decomposition table, the lower process compatibility table, the available process table, and the attribute definition table.

FLOW CONVERSION SYSTEM FOR A MANUFACTURING PROCESS, METHOD FOR CONVERTING A PROCESS FLOW, SYSTEM FOR CONTROLLING MANUFACTURING PROCESS, METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND A COMPUTER PROGRAM PRODUCT

A system for automatically producing semiconductor products has a section for preparing a process flow containing a series of processes and process conditions for producing different semiconductor products in different quantities in a production line; a section for simulating the producing of semiconductor products according to the process flow; a section for feeding a result of the simulation back to the process flow preparation section, which optimizes the process flow according to the simulation result; and a section for producing semiconductor products according to the optimized process flow.

Semiconductor production system

System for automatically producing different semiconductor products in

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Tokyo, Japan

Yuichi Satoguchi