Hitachi, Ltd.

Other

Yuichi Ohyama

Seiji Ishikawa

Isao Miyazaki

Jun Nakazato

Masao Sakata

Yuzo Taniguchi

Sadao Shimoyashiro

Kazuhiko Matsuoka

Hiroto Nagatomo

Kimio Muramatsu

Tsutomu Okabe

Osamu Satou

Yuzaburo Sakamoto

Shuichi Hanashima

Taizo Hashimoto

Yutaka Ebara

Mari Nozoe

Yasuhiro Yoshitake

Kenji Watanabe

Masataka Shiba

Fumio Mizuno

Toshimitsu Hamada

Seiji Isogai

Ikuo Suzuki

Yoshiharu Shigyo

Makoto Ariga

Masami Ikota

Hidekuni Sugimoto

Tetsuji Yokouchi

Terushige Asakawa

Fumihito Inoue

Kazuhiko Kimura

Kinichi Nakahara

A process management system in accordance with the present invention includes inspection apparatuses for inspecting defects on a wafer, the inspection apparatuses being connected through a communication network, inspection information and image information obtained from these inspection apparatuses being collected to construct a data base and an image file, therein definition of defects is given by combinations of elements which characterize the defect based on the inspection information and the image information obtained from the inspection apparatuses. By giving definition of the defect, characteristics of the defect can be subdivided and known. Therefore, the cause of a defect can be studied.

Process management system

The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

Inspection data analyzing system

Process control system

The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

Inspection system and method using separate processors for processing different information regarding a workpiece such as an electronic device

A first signal generator and a second signal generator for setting measuring conditions of a connection pin of a device under test are disposed in each of a number of signal transmission circuits. Each of the signal generators stores therein information for setting a measuring condition in the form of a digital data, which is D-A converted, and this D-A converted output determines the measuring condition. Analog switches are disposed for selecting as a measuring condition of the connection pin either the D-A converted output of the first signal generator or that of the second signal generator. A first discriminator and a second discriminator for discriminating the quality of measured results of the connection pin of the device under test are disposed in each of the signal transmission circuits. In each of the discriminators, reference value information for discriminating the quality is stored in the form of digital data, which is D-A converted, and this D-A converted output and a measured result of the connection pin are compared with each other. A controller controls the operation of each of the signal transmission circuits.

Testing system

Growing community of inventors

Isesaki, Japan

Yuichi Ohyama