Adv Antest Corporation

Yuichi Nansai

Katsumi Kojima

Noriyuki Igarashi

Noboru Masuda

Haruki Nakajima

Takao Murayama

Tadashi Kainuma

An IC chip testing apparatus comprising a chamber,having inside it a test stage,for testing an IC chip,, cooling units,able to cool the inside of the chamber,to a temperature less than ordinary temperature, heating units,able to heat the inside of the chamber,to return it to ordinary temperature, temperature sensors,for detecting the temperature inside the chamber,, and a temperature controller,for controlling the outputs of the cooling units and/or heating units,in accordance with the outputs from the temperature sensors. The apparatus not only makes the temperature control stop but also automatically performs ordinary temperature reset processing when an alarm signal of a temperature abnormality inside the chamber is detected. Further, the apparatus automatically performs ordinary temperature reset processing when the time of continuous operation of the device testing apparatus is more than a predetermined time. In accordance with the apparatus, condensation can be effectively prevented from occurring inside the chamber even when a temperature alarm is emitted or the testing apparatus is operated continuously for a long period of time.

Device testing apparatus and test method

An IC testing apparatus,for performing a test by applying at least a low temperature stress to ICs to be tested comprising a refrigerant cycle,wherein at least a compressor,, condenser,, expansion valve,and evaporator,are connected in this order, and a cold air applying line,having a blower,for supplying heat exchanged cold air by the evaporator,to the ICs to be tested.

IC testing apparatus

Growing community of inventors

Tokyo, Japan

Yuichi Nansai