Tosoh Corporation

Yuichi Nagasaki

Osamu Matsunaga

Tsutomu Takahata

An indium oxide-tin oxide (ITO) sintered body is prepared by mixing a tin oxide powder with an indium oxide powder, molding the resulting mixed powder to obtain a green body, and sintering the resulting green body. At least the tin oxide powder has beforehand been pulverized by colliding tin oxide particles with each other or against a collision substance in gas streams. At least 90 wt % of the pulverized tin oxide powder is preferably particles having a particle size of 0.2-10 .mu.m. A jet mill can be used for the pulverization. The ITO sintered body has a density as high as 7.08 g/cm.sup.3 or more and, during sputtering, is free from nodule formation and is inhibited from generating particles.

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Yokohama, Japan

Yuichi Nagasaki