Kabushiki Kaisha Toshiba

Toshiba Memory Corporation

Yuichi Kuroda

Noriaki Yoshikawa

Terumi Muguruma

Masaki Hirano

Tadashi Yotsumoto

Kenichi Otsuka

Kiyotaka Inoue

Yoshitaka Hasegawa

Yoshikatsu Mizuna

A particle measuring apparatus includes a light source configured to irradiate a gas with light, a first optical detection unit configured to detect an intensity of reflected light from particles contained in the gas, and configured to output a first parameter value corresponding to the intensity of the reflected light, and a storage unit that stores first data indicating corresponding relationships between first parameter values particle components. The particle measuring apparatus further includes a calculation unit configured to compare the first parameter value transmitted from the first optical detection unit with the first data transmitted from the storage unit to determine a component of the particles contained in the gas.

Particle measuring apparatus

A particle detecting apparatus has a condensing and growing unit to condense and grow a condensing component over particles contained in a gas while the gas imported through an inflow port is transported from a low temperature portion to a high temperature portion, a particle detector to detect a concentration of the particles contained in the gas discharged from an outflow port of the condensing and growing unit, a particle feeder to feed, to the inflow port of the condensing and growing unit, a test gas containing test particles whose particle diameter and the number of particles per unit volume are known, and a first determinator to determine whether a concentration of the test particles contained in the test gas detected by the particle detector has a predetermined value.

Particle detecting apparatus

A particle measuring apparatus according to an embodiment includes a first supply part that introduces first gas. A second supply part introduces second gas having been filtered. A light source irradiates mixture gas including the first gas and the second gas with light. A light detector detects reflected light from the mixture gas and measures number of particles contained in the mixture gas. A pump sucks the mixture gas.

Particle measuring apparatus and particle measuring method

A particle supply device according to one embodiment includes a housing and a particle supplier. The housing seals a space between a substrate carry-out port provided in a FOUP and a substrate carry-in port provided at a load port of a substrate processing device. A particle supplier supplies particles to an inside of the housing.

Particle supply device and particle supply method

A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for storing substrates is composed of a box for accommodating the substrates, and a closure member for sealingly closing the box by tightly fixing the closure member to the opening of the box. The container for storing substrates is provided with means for temporarily storing a sealing gas and introducing the sealing gas into the box. Also, the container for storing substrates is provided with means for means for temporarily forming a low pressure space for the purpose of evacuating the gas inside of the box by transferring the gas to the low pressure space.

Wafer container

A pod for storing and carrying substrates consists of a pod body and a cover. An inlet and an outlet are formed on one of the pod body and cover. The cover is tightly fitted to the pod body to close the inside of the pod body. A washing liquid is introduced into the pod through the inlet and is discharged from the pod through the outlet, thereby easily washing the inside of the pod with the pod itself serving as a washing tank. A washing cover has an inlet, an outlet, and a heater. The washing cover is attached to the pod body when washing the inside of the pod body. Further provided is a cleaning apparatus having pipes and a pump that are connected to the washing cover. The cleaning apparatus may have a table serving as the washing cover. The table is connected to pipes and a pump.

Pod and method of cleaning it

Storage equipment simply and effectively maintains the cleanness of substrates stored therein. The substrates in the storage equipment are set in a pod. The storage equipment has removable covers, a unit for fitting the covers to pods, respectively, a unit for holding the pods with the covers, a gas supply unit for individually supplying gas into the pods through the covers, and an exhaust unit for individually discharging an atmosphere from the pods through the covers. Each pod is closed with the cover in the storage equipment, and the gas supply unit and exhaust unit periodically replace an atmosphere in each pod with inert gas or evacuate each pod, to control the storage conditions of each pod in the storage equipment.

Clean storage equipment for substrates and method of storing substrates

There is provided an aircraft position monitoring system for monitoring the position of aircraft in a ground station. An air-borne sub-system mounted in the aircraft acquires, automatically and periodically, monitor data including data on the aircraft position, ID and FOM. The acquired monitor data is transmitted to the ground station via a satellite communication line or a data communication line. In the ground station, the monitor data sent from the aircraft is sent to a monitoring device and a tracking processing unit. The resultant data is displayed on a display device. The tracking processing unit collates the input monitor data with track data in a track file prepared on the basis of flight schedule data of the aircraft, and determines presence/absence of correlation therebetween by referring to FOM data in the monitor data. On the basis of the determination result, the existing track file is updated or a new track file is prepared. Thus, the tracking processing of each aircraft is performed. The display device shows position and ID data relating to the aircraft, the tracking processing of which has been performed by the tracking processing unit, in a mode which can be easily recognized.

Aircraft position monitoring system

A secondary surveillance radar system combines a mechanical scanning type of mode-S sensor using a mechanical rotation type of antenna and an electronic scanning type of mode-S sensor using an electronic scanning type of antenna. The mechanical scanning type of mode-S sensor performs at least mode-A/C general inquiry/response with aircraft targets and create a file of surveillance data obtained by the general inquiry/response. This allows circumvention of problems, which would be encountered in performing the same processing by using the electronic scanning system, such as the deterioration of accuracy of monopulse angular measurement, the increasing probability that unwanted responses will be received, etc., which are due to the elevation dependence of horizontal beamwidths. The electronic scanning type of mode-S sensor performs at least mode-S individual inquiry/response, reducing the time interval allotted for the general inquiry/response, thereby permitting an increase in data link communications capacity, and real-time communications.

Secondary surveillance radar system

A monopulse radar equipment is developed which comprises first and second radiators arranged in symmetrical positions with respect to the boresight axis to radiate radar pulses in a predetermined cycle and thus to produce first and second directional radiation patterns, a beam forming network for synthesizing in an in-phase and opposite-phase relation the first and second directional radiation patterns of the first and second radiations into sum and different patterns, and a multichannel receiver for forming from the sum and difference patterns an off-boresight signal representing a deviation of a target object from the boresight direction and a sidelobe suppressed signal resulting from suppressing a sidelobe response of the sum pattern. The first and second directional couplers are interposed on the sum and difference pattern signal transmission channels between the beam forming network and the multichannel receiver. The first and second calibration signals of the same amplitude and phase are injected onto the sum and difference pattern signal transmission channels through the first and second directional couplers. The calibration signal is detected at the output terminal of the multichannel receiver and the phase characteristics between the sum and difference pattern signal transmission channels are compensated for in accordance with a result of detection.

Growing community of inventors

Mie, Japan

Yuichi Kuroda