Canon Kabushiki Kaisha

Yuichi Fujita

Takahiro Matsumoto

Takafumi Miyaharu

Shinichi Shudo

Ryo Nakayama

Shinichiro Hirai

Hironobu Fujishima

A detection apparatus includes an image sensing device having an image sensing plane including a first periodic structure; and an optical system configured to illuminate a detection target including a second periodic structure different from the first periodic structure, and form an image of light from the detection target on the image sensing plane. Light having entered the image sensing plane generates a plurality of diffracted light beams of different orders in accordance with the first periodic structure. A normal of the image sensing plane is tilted with respect to an optical axis of the optical system such that the optical axis is located between diffracted light beams of adjacent orders not less than a first order among the plurality of diffracted light beams.

Detection apparatus, lithography apparatus, and article manufacturing method

A inspection apparatus for detecting a foreign matter on a substrate on which a pattern is formed includes a detection unit including a light projector for projecting light on a surface of the substrate and a light receiver, a change mechanism for changing an area of the light projected by the light projector to a first area and a second area that is smaller than the first area without changing a light amount, and a control unit for detecting the foreign matter based on a first light amount received by the light receiver in a case where the light is projected in the first area on the surface of the substrate and a second light amount received by the light receiver in a case where the light is projected in the second area on the surface of the substrate.

Foreign matter inspection apparatus, foreign matter inspection method, processing apparatus, and article manufacturing method

A discharge apparatus includes a discharge unit and a detection unit. The discharge unit is configured to discharge liquid containing a volatile compound from a discharge port. The detection unit is configured to detect discharge of the liquid by detecting, using light, a volatile component volatilizing from the liquid when the liquid is discharged from the discharge port.

Growing community of inventors

Utsunomiya, Japan

Yuichi Fujita