Shinkawa Ltd.

Yuhei Ito

John Ditri

Mitsuaki Sakakura

Nobuyuki Aoyagi

Hiroshi Munakata

Hikaru Miura

Takuya Asami

Moe Tehrani

An ultrasonic horn () includes: a vibration source part () to which an ultrasonic vibrator () is mounted; a tip end part () to which a capillary () is mounted; and an intermediate part () which is interposed between the tip end part () and the vibration source part () and propagates vibration generated by the ultrasonic vibrator () to the tip end part (). The intermediate part () is formed with a single spiral hole () which is a hole penetrating in a radial direction of the ultrasonic horn () and advances in an axial direction as the spiral hole advances in a circumferential direction.

Ultrasonic horn and manufacturing apparatus of semiconductor device

An ultrasound horn is provided which vibrates a bonding tool, attached at a tip, in a plurality of directions with a simple structure. There is provided an ultrasound horn having: a longitudinal vibration generator; a horn portion; and a torsional vibration generator. The torsional vibration generator includes a body including a polygonal pillar portion, second layered elements in which a plurality of second piezoelectric elements are layered, and which are attached to side surfaces of the polygonal pillar portion, weights, and a pressure application ring which applies a pressure by pressing the second piezoelectric elements against the polygonal pillar portion via the weights.

Ultrasound horn

Growing community of inventors

Tokyo, Japan

Yuhei Ito