Tsinghua University

Beihang University

Yuhang Li

Zhen Zhang

Lijun Wang

Yingchun Guan

Huaming Wang

Zhongyang Xu

The present disclosure relates to a high-precision and high-efficiency laser polishing method oriented to a large-size ultra-thin mask plate, and belongs to the technical field of advanced laser manufacturing. A high-precision and high-efficiency laser polishing technology is applied to the surface smoothness improvement of the large-size ultra-thin mask plate. The high-precision and high-efficiency laser polishing method specifically comprises the four following steps: step one, selecting and placing an ultra-thin invar alloy mask plate on a five-axis machining platform; step two, adopting a nanosecond continuous laser, and setting a laser incident angle; step three, setting N laser polishing areas; and step four, performing laser polishing continuous splicing. Compared with the prior art, the surface smoothness of the mask plate is improved, the polishing efficiency is high, the precision is high, and the influence on the geometrical characteristic size of the appearance of an original mask plate is low.

High-precision and high-efficiency laser polishing method oriented to large-size ultra-thin mask plate

Described are methods and apparatuses for manufacturing ultralong fiber Bragg gratings with arbitrary reflection wavelength. The method may include: generating two holographic beams entering a fiber with a certain intersection angle there-between from one side of the fiber and forming holographic interference fringes in the fiber, driving the two holographic beams to scan along the fiber by a motorized translation stage controlled by a computer; and adjusting the intersection angle between the two beams by motorized rotation stages or motorized mirror mounts controlled by the computer. The present disclosure can be applied in manufacturing ultralong fiber Bragg gratings with arbitrary reflection wavelength, such as narrow-reflection-band gratings, chirped gratings, and apodized gratings, etc.

Methods and apparatuses for manufacturing ultralong fiber Bragg gratings with arbitrary reflection wavelength

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Beijing, China

Yuhang Li