Institute of Nuclear Energy Research, Atomic Energy Council, Executive Yuan, R.o.c

Institute of Nuclear Energy Research, Atomic Energy Council, Executive Yuan

Yuh-Jenq Yu

Der-Jun Jan

Tien-Hsiang Hsueh

Chi-Hung Su

Tien-F Ko

Yuan-Ruei Jheng

A refined microcrystalline electrode manufacturing method is provided. The refined microcrystalline electrode manufacturing method includes the following step. First, an active material electrode layer is subjected to a conventional thermal annealing (CTA) process in an oxygen-containing environment at a first temperature interval to form an active material crystallization precursor; the active material crystallization precursor is subjected to a rapid thermal annealing (RTA) process in the oxygen-containing environment at a second temperature interval to form an active material coating layer with uniformly distributed fine microcrystal grains, wherein the temperature range of the second temperature interval is greater than the temperature range of the first temperature interval. In addition, a thin film battery and a thin film battery manufacturing method are also provided.

Thin film battery, thin film battery manufacturing method and refined microcrystalline electrode manufacturing method

An apparatus is provided for plating a lithium (Li)-compound thin film. In the thin film, Li is obtained through thermal evaporation, and titanium (Ti) or other metal by using arc plasma. The elements converted into gas phase are co-deposited in a plasma environment with a reaction gas (oxygen) to be activated as excited atoms or molecules for reaction. In the end, all of the constituent elements are deposited on a substrate to form the Li-compound thin film. Thus, reaction efficiency is high with a fast deposition rate. The composition ratio of each element is independently determined to control its yield according to the requirement. Hence, the present invention greatly enhances the fabrication rate with lowered production cost for applications in the thin-film battery industries.

Apparatus of reactive cathodic arc evaporator for plating lithium-compound thin film and method thereof

A thin film battery structure includes a substrate, a first current collector layer, a first electrode layer array, an electrolyte layer, a second electrode layer, and a second current collector layer. The first current collector layer is disposed on the substrate and has at least one first current collector bump. The first electrode layer array has at least one first electrode layer, where each first electrode layer is disposed on the first current collector layer, and at least one first current collector bump is embedded inside each first electrode layer. Each first electrode layer is embedded inside the electrolyte layer. The second electrode layer is disposed on the electrolyte layer. The second current collector layer is disposed on the second electrode layer.

Growing community of inventors

Taoyuan, Taiwan

Yuh-Jenq Yu