Atlantic Richfield Company

The United States of America as Represented by the Administrator of the

Yuh-Han Shing

James H Ermer

David P Tanner

Vijay K Kapur

Stephen C Miller

Uppala V Choudary

Robert B Love

John W Sibert

Richard R Potter

Nang T Tran

Steven C Lewis

Frederick S Pool

Hard amorphous hydrogenated carbon, diamond-like films are deposited using an electron cyclotron resonance microwave plasma with a separate radio frequency power bias applied to a substrate stage. The electron cyclotron resonance microwave plasma yields low deposition pressure and creates ion species otherwise unavailable. A magnetic mirror configuration extracts special ion species from a plasma chamber. Different levels of the radio frequency power bias accelerate the ion species of the ECR plasma impinging on a substrate to form different diamond-like films. During the deposition process, a sample stage is maintained at an ambient temperature of less than 100.degree. C. No external heating is applied to the sample stage. The deposition process enables diamond-like films to be deposited on heat-sensitive substrates.

Deposition of diamond-like films by ECR microwave plasma

A photoconductive device of decreased resistivity is provided by using at least one zinc oxide transparent conductive layer in conjunction with a thin film amorphous silicon photoconductor. The zinc oxide layer can be used as the front contact, the back contact or both the front and back contacts of the photoconductive device.

Photoconductive device containing zinc oxide transparent conductive layer

A thin film photovoltaic device having first layer of copper indium selenide, a second layer of cadmium sulfide having a thickness less than 2500 angstroms, and a third layer of conducting wide bandgap semiconductor such as zinc oxide. The transparent third layer allows good transmission of blue light to the junction region while fully depleting the junction area to improve device voltage.

CuInSe.sub.2 thin film solar cell with thin CdS and transparent window

Growing community of inventors

Thousand Oaks, CA, United States of America

Yuh-Han Shing