Sumitomo Electric Industries, Limited

A.l.m.t. Corporation

Yugaku Abe

Shinichi Yamagata

Yoshishige Takano

Akira Fukui

Yoshiyuki Hirose

Takatoshi Takikawa

Makoto Imamura

Shin-ichi Yamagata

Tetsuya Hayashi

Masatoshi Majima

Koji Nitta

Shinji Inazawa

Akira Sasame

Kouichi Takashima

Mitsuo Osada

Osamu Suwata

Hiroshi Yokoyama

Akihisa Hosoe

Kazuya Kamitake

There is provided a metal laminated structure comprising a first metal layer, a second metal layer and a third metal layer, the first metal layer being disposed on one surface of the second metal layer, the third metal layer being disposed on the other surface of the second metal layer, the first metal layer including at least one of tungsten and molybdenum, the second metal layer including copper, the third metal layer including at least one of tungsten and molybdenum, and a method for producing the metal laminated structure.

Metal laminated structure and method for producing the metal laminated structure

There is provided a metal laminated structure in which a first metal layer containing tungsten is provided on a first surface of a second metal layer containing copper and a third metal layer containing tungsten is provided on a second surface of the second metal layer opposite to the first surface, and the first metal layer contains crystal grains of tungsten in a form of a columnar crystal extending in a direction perpendicular to the first surface of the second metal layer and the third metal layer contains crystal grains of tungsten in a form of a columnar crystal extending in a direction perpendicular to the second surface of the second metal layer, and a method for producing the metal laminated structure.

Metal laminated structure and method for producing the same

In a semiconductor heat-dissipating substrate made of a Cu&#x2014;W alloy whose pores have been infiltrated with copper, being a porous tungsten body whose pore diameter at a specific cumulative surface area of 95% is 0.3 &#x3bc;m or more, and whose pore diameter at a specific cumulative surface area of 5% is 30 &#x3bc;m or less, thermal conductivity of 210 W/m&#xb7;K or more is obtained by decreasing the content of iron-family metal to be less than 0.02 weight %. Likewise, changing the amount of infiltrated copper in a molded object by utilizing a multi-shaft press to vary the amount of vesicles in the middle and peripheral portions makes for offering at low cost a semiconductor heat-dissipating substrate that in between middle and peripheral portions made of different materials does not have bonding matter.

Semiconductor heat-dissipating substrate, and manufacturing method and package therefor

In a semiconductor heat-dissipating substrate made of a Cu&#x2014;W alloys whose pores have been infiltrated with copper, being a porous tungsten body whose pore diameter at a specific cumulative surface area of 95% is 0.3 &#x3bc;m or more, and whose pore diameter at a specific cumulative surface area of 5% is 30 &#x3bc;m or less, thermal conductivity of 210 W/m&#xb7;K or more is obtained by decreasing the content of iron-family metal to be less than 0.02 weight %. Likewise, changing the amount of infiltrated copper in a molded object by utilizing a multi-shaft press to vary the amount of vesicles in the middle and peripheral portions makes for offering at low cost a semiconductor heat-dissipating substrate that in between middle and peripheral portions made of different materials does not have bonding matter.

To provide a substrate material made of an aluminum/silicon carbide composite alloy which has a thermal conductivity of 100 W/m&#xd7;K or higher and a thermal expansion coefficient of 20&#xd7;10/&#xb0; C. or lower and is lightweight and compositionally homogeneous. A substrate material made of an aluminum/silicon carbide composite ally which comprises Al&#x2014;SiC alloy composition parts and non alloy composition part and dispersed therein from 10 to 70% by weight silicon carbide particles, and in which the fluctuations of silicon carbide concentration in the Al&#x2014;SiC alloy composition parts therein are within 1% by weight. The substrate material is produced by sintering a compact of an aluminum/silicon carbide starting powder at a temperature not lower than 600&#xb0; C. in a non-oxidizing atmosphere.

Susbstrate material for mounting a semiconductor device, substrate for mounting a semiconductor device, semiconductor device, and method of producing the same

A composite material that consists mainly of ceramic and semi-metal, that is high in thermal conductivity, that is light in weight, and that has high compatibility in coefficient of thermal expansion (CTE) with a semiconductor element and another member comprising ceramic; a member comprising this composite material; and a semiconductor device comprising the member. The composite material has a structure in which the interstices of a three-dimensional network structure comprising ceramic are filled with a semi-metal-containing constituent produced by deposition after melting, has a CTE of 6 ppm/&deg; C. or less, and has a thermal conductivity of 150 W/m&middot;K or more. The semiconductor device comprises the composite material. The composite material can be obtained by filling the pores of a porous body consisting mainly of ceramic with a semi-metal-containing constituent.

Composite material and semiconductor device using the same

To provide a substrate material made of an aluminum/silicon carbide composite alloy which has a thermal conductivity of 100 W/m&times;K or higher and a thermal expansion coefficient of 20&times;10 /&deg; C. or lower and is lightweight and compositionally homogeneous. A substrate material made of an aluminum/silicon carbide composite ally which comprises Al&mdash;SiC alloy composition parts and non alloy composition part and dispersed therein from 10 to 70% by weight silicon carbide particles, and in which the fluctuations of silicon carbide concentration in the Al&mdash;SiC alloy composition parts therein are within 1% by weight. The substrate material is produced by sintering a compact of an aluminum/silicon carbide starting powder at a temperature not lower than 600&deg; C. in a non-oxidizing atmosphere.

Substrate material for mounting a semiconductor device, substrate for mounting a semiconductor device, semiconductor device, and method of producing the same

To provide a substrate material made of an aluminum/silicon carbide composite alloy which has a thermal conductivity of 100 W/m&times;K or higher and a thermal expansion coefficient of 20&times;10,/&deg; C. or lower and is lightweight and compositionally homogeneous. A substrate material made of an aluminum/silicon carbide composite ally which comprises Al&mdash;SiC alloy composition parts and non alloy composition part and dispersed therein from 10 to 70% by weight silicon carbide particles, and in which the fluctuations of silicon carbide concentration in the Al&mdash;SiC alloy composition parts therein are within 1% by weight. The substrate material is produced by sintering a compact of an aluminum/silicon carbide starting powder at a temperature not lower than 600&deg; C. in a non-oxidizing atmosphere.

A nitrogenous Al--Si powder metallurgical alloy contains at least 4 wt % and at most 15 wt % of nitrogen, with the remaining part consisting essentially of Al, Si and an unavoidable component. Consequently, a highly safe material which is lightweight and has a density of at most 3.0 g/cm.sup.3, a thermal expansion coefficient in the range of 5 to 10.times.10.sup.-6 /.degree.C., and a thermal conductivity coefficient of at least 0.2 cal/cm.multidot.sec.multidot..degree.C. has been obtained.

Nitrogenous aluminum-silicon powder metallurgical alloy

A semiconductor device has a heat radiating fin attached to a semiconductor packaging device which holds a semiconductor element for externally diffusing heat generated by the semiconductor element. The fin is light in weight and has an improved thermal conductivity, since the heat radiating fin is made of an aluminum alloy or of a pure aluminum secured to a connecting member by a direct metallic bond. The connecting member is made of a Mo--Cu composite material. The fin and the connecting member are friction welded to each other to form the metallic bond at an interface between the fin and the connecting member.

Radiating fin having an improved life and thermal conductivity

A housing for a semiconductor device is improved to avoid thermal distortion. The housing is formed of an Al-Si compound material and includes a housing member having a space for holding the semiconductor device. Occlusion gas contained in the Al-Si compound material is removed so that at least any nitrogen gas remaining in occlusion after degassing is 0.1 percent by weight or less. Since the housing member substantially does not contain occlusion gas, the housing is not subject to thermal distortion even though the housing is exposed to heat in operation.

Growing community of inventors

Itami, Japan

Yugaku Abe