Beijing Voyager Technology Co., Ltd.

Recode Therapeutics, Inc.

Yufeng Wang

Youmin Wang

Gary Li

Qin Zhou

Kong Yin Ho

Sae Won Lee

David J Lockhart

Brandon A Wustman

Mirko Hennig

Daniella Ishimaru

Sakya Sing Mohapatra

Vladimir Grigor'evich Kharitonov

Ali Ahmed Alfaifi

Joseph S Cefalu

Shuang Li

Julia Jung-un Baek

Sergio Fabian Almeida Loya

Sergio Almeida

Embodiments of the disclosure provide a scanner for steering optical beams. In certain configurations, the scanner may include a micro-electromechanical system (MEMS) scanning mirror independently rotatable around a first axis and a second axis orthogonal to the first axis. The scanner may further include a piezoelectric actuator coupled to the MEMS scanning mirror, where the piezoelectric actuator has a first pair of piezoelectric electrodes configured to drive the MEMS scanning mirror to rotate around the first axis, and a second pair of piezoelectric electrodes configured to drive the MEMS scanning mirror to simultaneously rotate around the second axis.

Two-axis scanning mirror using piezoelectric drivers

Provided are methods for delivering lipid nanoparticles (LNPs) to a lung cell of a subject suffering from or at risk for primary ciliary dyskinesia (PCD), wherein the method comprises nebulizing a liquid pharmaceutical composition to generate an aerosolized pharmaceutical composition, and administering the aerosolized pharmaceutical composition to the subject.

Lipid nanoparticle compositions and uses thereof

In one example, an apparatus being part of a Light Detection and Ranging (LiDAR) module of a vehicle and comprises: a semiconductor integrated circuit comprising a microelectromechanical system (MEMS) and a substrate, the MEMS comprising an array of micro-mirror assemblies, each micro-mirror assembly comprising: a micro-mirror; and an actuator directly connected to the substrate and mechanically connected to an end portion of the micro-mirror and deformable in response to an electrical signal to generate a torque to rotate the micro-mirror around a rotation axis to reflect light emitted by a light source out of the LiDAR module or to reflect light received by the LiDAR module to a receiver.

Mirror assembly for light steering

Embodiments of the disclosure provide a scanner for steering optical beams. In certain configurations, the scanner may include a scanning mirror independently rotatable around a first axis and a second axis. In certain other configurations, the scanner may also include a first driver configured to drive the scanning mirror to rotate around the first axis. In still other configurations, the scanner may further include a second driver configured to drive the scanning mirror to simultaneously rotate around the second axis. In certain aspects, the first driver and the second driver may be different types of drivers.

System and method for driving a two-axis scanning mirror using drivers of different types

Embodiments of the disclosure provide a scanning mirror assembly. In certain configurations, the scanning mirror assembly may include a two-dimensional micro-electromechanical system (MEMS) scanning mirror, a skeleton on a back surface of the MEMS scanning mirror, a first pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a first pair of serpentine torsion springs, and a second pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a second pair of serpentine torsion springs. The first pair of piezoelectric electrodes drives the MEMS scanning mirror and the skeleton to rotate around a first axis, and the second pair of piezoelectric electrodes drives the MEMS scanning mirror and the skeleton to rotate around a second axis orthogonal to the first axis.

Two-axis scanning mirror using piezoelectric drivers and serpentine torsion springs

Embodiments of the disclosure provide magnetic sensing systems and methods for a polygon scanner. An exemplary magnetic sensing system includes a disc permanent magnet configured to provide a magnetic field. The magnetic sensing system further includes a Hall sensor configured to generate a voltage proportional to the strength of the magnetic field as the Hall sensor and the disc permanent magnet move relatively to each other when the polygon mirror rotates. One of the disc permanent magnet and the Hall sensor locates on and rotates with the polygon mirror and the other locates off the polygon mirror. The magnetic sensing system also includes at least one controller configured to determine a rotation angle of the polygon mirror based on the generated voltage by the Hall Sensor.

Magnetic sensing for a polygon mirror using a hall sensor for LiDAR system

Embodiments of the disclosure provide a scanning mirror assembly. In certain configurations, the scanning mirror assembly may include a two-dimensional micro-electromechanical system (MEMS) scanning mirror, a first pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a first pair of looped torsion springs, and a second pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a second pair of looped torsion springs. The first pair of piezoelectric electrodes drives the MEMS scanning mirror to rotate around a first axis. The second pair of piezoelectric electrodes drives the MEMS scanning mirror to rotate around a second axis orthogonal to the first axis.

Two-axis scanning mirror using piezoelectric drivers and looped torsion springs

Embodiments of the disclosure provide magnetic sensing systems and methods for a galvanometer scanner configured to rotate within a predetermined angular range. An exemplary magnetic sensing system includes a disc permanent magnet configured to provide a magnetic field. The magnetic sensing system further includes a Hall sensor configured to generate a voltage proportional to the strength of the magnetic field as the Hall sensor and the disc permanent magnet move relatively to each other when the galvanometer scanner rotates. One of the disc permanent magnet and the Hall sensor locates on and rotates with the galvanometer scanner and the other locates off the galvanometer scanner. The magnetic sensing system also includes at least one controller configured to determine a rotation angle of the galvanometer scanner based on the generated voltage by the Hall Sensor.

Magnetic sensing for a galvanometer scanner using a hall sensor for LiDAR system

Embodiments of the disclosure provide magnetic sensing systems and methods for a scanning mirror. An exemplary magnetic sensing system includes a permanent magnet configured to provide a magnetic field. The magnetic sensing system further includes a wire coil configured to rotate relative to the permanent magnet when the scanning mirror rotates, causing an induced voltage in the wire coil. One of the permanent magnet and the wire coil locates on and rotates with the scanning mirror and the other locates off the scanning mirror. The magnetic sensing system also includes at least one controller configured to determine a rotation angle of the scanning mirror based on the induced voltage in the wire coil.

Magnetic sensing for a scanning mirror in LiDAR system

Embodiments of the disclosure provide a mirror assembly for controlling optical directions in an optical sensing system. The mirror assembly may include a frame and a beam structure mechanically coupled to the frame. The beam structure may define a rotational axis. The mirror assembly may also include a micro mirror suspended by the beam structure. The mirror assembly may further include a plurality of piezoelectric actuators mechanically coupled to the frame and configured to rotate the micro mirror along the rotational axis. Each of the plurality of piezoelectric actuators may be disposed between the rotational axis and an outer edge of the frame.

MEMS mirror assemblies with piezoelectric actuators

Embodiments of the disclosure provide a micromachined mirror assembly for controlling optical directions in an optical sensing system. The micromachined mirror assembly may include a micro mirror configured to direct an optical signal into a plurality of directions. The micromachined mirror assembly may also include at least one actuator coupled to the micro mirror and configured to drive the micro mirror to tilt around an axis. The micromachined mirror assembly may further include one or more objects attached to the micro mirror. The one or more objects may be asymmetrically disposed with respect to the axis to create an imbalanced state of the micro mirror when the micro mirror is not driven by the at least one actuator.

Micromachined mirror assembly with asymmetric structure

In one example, an apparatus that is part of a Light Detection and Ranging (LiDAR) module of a vehicle comprises a semiconductor integrated circuit comprising a microelectromechanical system (MEMS) and a substrate. The MEMS comprises an array of micro-mirror assemblies, each micro-mirror assembly comprising: a micro-mirror having a first thickness; and an actuator comprising first fingers and second fingers, the first fingers being connected with the substrate, the second fingers being mechanically connected to the micro-mirror having a second thickness smaller than the first thickness, the actuator being configured to generate an electrostatic force between the first fingers and the second fingers to rotate the micro-mirror to reflect light emitted by a light source out of the LiDAR module or light received by the LiDAR module to a receiver.

Mirror assembly for light steering with reduced finger thickness

In one example, an apparatus being part of a Light Detection and Ranging (LiDAR) module is provided. The apparatus comprises a microelectromechanical system (MEMS) and a substrate. The MEMS comprising an array of micro-mirror assemblies, each micro-mirror assembly comprises: a first flexible support structure and a second flexible support structure connected to the substrate; a micro-mirror comprising a first connection structure and a second connection structure, the first connection structure being connected to the first flexible support structure at a first connection point, the second connection structure being connected to the second flexible support structure at a second connection point, the first and second connection points being aligned with a rotation axis around which the micro-mirror rotates, the first flexible support structure and the second flexible support structure being configured to allow the first and second connection points to move when the micro-mirror rotates.

Mirror assembly for light steering with flexible support structure

A piezoelectric actuator including an anchor, an elastic layer having a first end coupled to the anchor, and a piezoelectric layer on the elastic layer. The elastic layer includes a solid sublayer including an elastic material and a second sublayer including a plurality of cavities. The piezoelectric layer is on the second sublayer of the elastic layer and includes a top electrode, a bottom electrode, and a piezoelectric material layer between the top electrode and the bottom electrode.

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Mountain View, CA, United States of America

Yufeng Wang