Applied Materials, Inc.

Tesla, Inc.

Yufei Zhu

Dmitry Lubomirsky

Soonam Park

Nitin K Ingle

Jiayin Huang

Edwin C Suarez

Saurabh Garg

Satoru Kobayashi

Scott Michael Graves

Benjamin Dellal

Eric Bellemare

Diego Alberto Silva Rodriguez

An electric pump system and method of operating the same involves pumping a fluid through a fluid passageway defined in a mechanical pump from a pump inlet to a hollow shaft of a motor, through the hollow shaft to an internal motor cavity defined by a housing of the motor, and through another fluid passageway defined in the motor housing and mechanical pump that leads to a pump outlet. The system and method further involve pumping the fluid through another fluid passageway defined in the mechanical pump from yet another pump inlet to the pump outlet. The temperature of fluid exiting the hollow shaft can be assessed and used by an electronic control unit (ECU) of the electric pump system to control the same. The electric pump system can be part of a cooling and lubrication system for an electric vehicle transmission, gearbox, differential or transfer case, for example.

Electric pump system and method with hollow shaft and temperature sensor

Electric pump system and method

In an embodiment, a plasma source includes a first electrode, configured for transfer of one or more plasma source gases through first perforations therein; an insulator, disposed in contact with the first electrode about a periphery of the first electrode; and a second electrode, disposed with a periphery of the second electrode against the insulator such that the first and second electrodes and the insulator define a plasma generation cavity. The second electrode is configured for movement of plasma products from the plasma generation cavity therethrough toward a process chamber. A power supply provides electrical power across the first and second electrodes to ignite a plasma with the one or more plasma source gases in the plasma generation cavity to produce the plasma products. One of the first electrode, the second electrode and the insulator includes a port that provides an optical signal from the plasma.

Systems and methods for internal surface conditioning assessment in plasma processing equipment

A method of conditioning internal surfaces of a plasma source includes flowing first source gases into a plasma generation cavity of the plasma source that is enclosed at least in part by the internal surfaces. Upon transmitting power into the plasma generation cavity, the first source gases ignite to form a first plasma, producing first plasma products, portions of which adhere to the internal surfaces. The method further includes flowing the first plasma products out of the plasma generation cavity toward a process chamber where a workpiece is processed by the first plasma products, flowing second source gases into the plasma generation cavity. Upon transmitting power into the plasma generation cavity, the second source gases ignite to form a second plasma, producing second plasma products that at least partially remove the portions of the first plasma products from the internal surfaces.

Systems and methods for internal surface conditioning in plasma processing equipment

A test fixture includes an outer conductor and an inner conductor disposed within and electrically isolated from the outer conductor. The inner conductor includes a top portion having a first diameter, a bottom portion having a second diameter, and a third portion proximate the bottom portion that has a third diameter that is less than the second diameter and is greater than the first diameter. An electrical property of a chamber component disposed within the outer conductor is measurable based on application of a signal to at least one of the outer conductor or the inner conductor.

Ceramic ring test device

A test device for testing an electrical property of a chamber component, such as a ceramic ring, includes an outer conductor and an inner conductor disposed within and electrically isolated from the outer conductor. The outer conductor has a base, a top, and an interior sidewall disposed between the base and the top. The inner conductor has a top portion having a first diameter and a bottom portion having a second diameter, in which the second diameter is greater than the first diameter. A sample area is defined between the base of the outer conductor and the bottom portion of the inner conductor, and is configured to receive a chamber component. The electrical property of the chamber component is measurable based on application of a signal to at least one of the outer conductor or the inner conductor.

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Sunnyvale, CA, United States of America

Yufei Zhu