Kla Tencor Corporation

Yuerui Chen

Fei Li

Techniques and systems for critical dimension metrology are disclosed. Critical parameters can be constrained with at least one floating parameter and one or more weight coefficients. A neural network is trained to use a model that includes a Jacobian matrix. During training, at least one of the weight coefficients is adjusted, a regression is performed on reference spectra, and a root-mean-square error between the critical parameters and the reference spectra is determined. The training may be repeated until the root-mean-square error is less than a convergence threshold.

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Shanghai, China

Yuerui Chen