University of Electronic Science and Technology of China

Yueming Wang

Chao Wang

Jing Jiang

Zezhan Zhang

Jun Hu

Fei Wang

Yang Yang

Ying Duan

Xueke Gou

Li Du

Hongchuan Jiang

Jiexiong Ding

Chengui Zhang

Yuhua Cheng

Yi Niu

Jie Xiong

Ting Zhou

Houjun Wang

Pei Huang

Dong Yan

Congjun Wu

Jinguang Lv

Jingqiu Liang

Xianfu Liu

Xiaojiang Shi

Bing Xiong

Tiezhong Ma

Huiyuan Geng

A real-time monitoring microscopic imaging system for nitride MOCVD (metal organic chemical vapor deposition) epitaxial growth mode includes an observation window, an imaging lens set, a CCD (charge coupled device) camera, an image capture card and an image storage and display device, wherein: the observation window is provided at a top portion of a graphite carrier in an MOCVD reaction chamber and is formed by a thicker quartz glass to prevent temperature in the reaction chamber from damaging the lenses. The microscopic imaging system provided by the present invention has the resolution better than 1 &#x3bc;m, is able to distinguish the 2D growth mode and the 3D growth mode, observe whether the surface of the epitaxial wafer has screw dislocations in the MOCVD process, so as to observe the growth mode of the MOCVD epitaxial wafer in real time during the growth process.

Real-time monitoring microscopic imaging system for nitride MOCVD epitaxial growth mode

An infrared temperature-measurement probe, including: a probe housing; a reflector; and a reflector adjusting mechanism. The probe housing includes an inner wall, an outer wall, a cooling channel sandwiched between the inner wall and the outer wall, a chamber surrounded by the inner wall, and a light transmission hole communicating with the chamber. The reflector includes a mirror and a mirror frame. The reflector adjusting mechanism includes a motion controller, a drive coupling, and three control rods. The reflector and the three control rods are disposed in the chamber of the probe housing. The motion controller is disposed outside the chamber of the probe housing. The drive coupling is disposed between the motion controller and the three control rods, and the motion controller is adapted to move each of the three control rods via the drive coupling. The mirror is imbedded in and is supported by the mirror frame.

Infrared temperature-measurement probe

An apparatus for measuring temperature of turbine blades, including: a radiation collection device, a data processing module; a master control unit (MCU); a calibration module; and a motion servo. The radiation collection device includes a scan reflector, a collimator lens, a first dichroic mirror, a first focus lens, a visible and near-infrared (VNIR) detector, a second dichroic mirror, a second focus lens, a short-wave infrared (SWIR) detector, a third focus lens, and a medium-wave infrared (MWIR) detector. The calibration module includes a calibration reflection mirror and a blackbody furnace. The scan reflector, the collimator lens, the first dichroic mirror, the second dichroic mirror, the third focus lens, and the MWIR detector are disposed successively along a first optical axis; the first dichroic mirror, the first focus lens, and the VNIR detector are disposed successively along a second optical axis that is perpendicular to the first optical axis.

Apparatus for measuring temperature of aero-engine turbine blades

A device for measuring surface-temperature of a turbine blade, the device including a probe having a front-end mirror for receiving infrared radiation of a surface on the blade, a collimation lens for refracted the infrared radiation, a PD detector to receive the infrared radiation, and a focal-length servo; and a radial-scanning servo connected to the probe. The front-end mirror, the collimation lens, and PD detector are disposed along the optical axis of the collimation lens. The focal-length servo is adapted to move the collimation lens along the optical axis of the collimation lens. The radial-scanning servo is adapted to move the probe along the optical axis of the collimation lens. The device of the invention is capable of accurately targeting a particular point on the blade having an irregular shape for temperature measurement to accurately detect the temperature distribution on the surface of the blade.

Device for measuring surface temperature of turbine blades

A method of collecting radiation information of a turbine blade, the method including: 1) collecting a radiated light from the surface of the turbine blade, analyzing the radiated light using a spectrometer to calculate compositions and corresponding concentrations of combustion gas; 2) calculating an absorption coefficient of the combustion gas at different concentrations; 3) calculating a total absorption rate of the combustion gas at different radiation wavelengths under different concentrations of component gases; 4) obtaining a relationship between the radiation and a wavelength; 5) finding at least 3 bands with a least gas absorption rate; 6) calculating a distance between a wavelength of a strongest radiation point of the turbine blade and the center wavelength, and selecting three central wavelengths closest to the wavelength with the strongest radiation; and 7) acquiring radiation data of the turbine blade in the windows obtained in 6).

Method of collecting radiation information of turbine blade

Growing community of inventors

Chengdu, China

Yueming Wang