Average Co-Inventor Count = 5.84
ph-index = 3
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Applied Materials, Inc. (29 from 13,741 patents)
2. Unity Semiconductor Corporation (1 from 299 patents)
30 patents:
1. 12148629 - Shutter disk
2. 12100577 - High conductance inner shield for process chamber
3. 12080522 - Preclean chamber upper shield with showerhead
4. 12074400 - Substrate dimension adapter
5. 12048948 - Methods for forming microwave tunable composited thin-film dielectric layer
6. 11913107 - Methods and apparatus for processing a substrate
7. 11881385 - Methods and apparatus for reducing defects in preclean chambers
8. 11862480 - Shutter disk
9. 11670513 - Apparatus and systems for substrate processing for lowering contact resistance
10. 11629409 - Inline microwave batch degas chamber
11. 11610807 - Methods and apparatus for cleaving of semiconductor substrates
12. 11569122 - Methods and apparatus for cleaving of semiconductor substrates
13. D973609 - Upper shield with showerhead for a process chamber
14. D971167 - Lower shield for a substrate processing chamber
15. 11375584 - Methods and apparatus for processing a substrate using microwave energy