United Microelectronics Corp.

Ipenval Consultant Inc.

United Semiconductor Corp.

Yueh-Feng Ho

Ming-Sheng Yang

Hwi-Huang Chen

Chao-Yuan Huang

Chia-Chieh Yu

Jy-Hwang Lin

Ching-Hsing Hsieh

Pei-Jen Wang

Yann-Pyng Wu

An integrated circuit layout comprises a through silicon via (TSV) configured to couple positive operational voltage VDD (VDD TSV), a through silicon via (TSV) configured to couple operational signals (signal TSV), a plurality of through silicon vias (TSVs) configured to couple operational voltage VSS (VSS TSVs) around the VDD TSV and the signal TSV and one or more backside redistribution lines (RDLs) connecting the VSS TSVs together to form a web-like heat dissipating structure at least surrounding the VDD TSV and the signal TSV.

Integrated circuit layout

A semiconductor device comprises a substrate, a through-silicon via (TSV) penetrating the substrate, a plurality of first interconnect structures, right above the TSV, configured for electrically coupling the TSV to a higher-level interconnect, a second interconnect structure traversing the TSV from the top and being configured for interconnect routing of an active device and a plurality of dummy metal patterns, right above the TSV, electrically isolated from the TSV, the first interconnect structures and the second interconnect structure.

Semiconductor device

A stacked chip system is provided to comprise a first chip, a second chip, a first group of through silicon vias (TSVs) connecting the first chip and second chip and comprising at least one first VSS TSV, at least one first VDD TSV, a plurality of first signal TSVs and at least one first redundant TSV and a second group of through silicon vias (TSVs) connecting the first chip and second chip and comprising at least one second VSS TSV, at least one second VDD TSV, a plurality of second signal TSVs and at least one second redundant TSV, wherein all the first group of TSVs are coupled by a first selection circuitry configured to select the at least one first redundant TSV and bypass at least one of the rest of the first group of TSVs, and wherein the at least one first redundant TSV and the at least second redundant TSV are coupled by a second selection circuitry configured to allow one of them to replace the other.

Stacked chip system

A method for fabricating a through-silicon via comprises the following steps. Provide a substrate. Form a through silicon hole in the substrate having a diameter of at least 1 &#x3bc;m and a depth of at least 5 &#x3bc;m. Perform a first chemical vapor deposition process with a first etching/deposition ratio to form a dielectric layer lining the bottom and sidewall of the through silicon hole and the top surface of the substrate. Perform a shape redressing treatment with a second etching/deposition ratio to change the profile of the dielectric layer. Repeat the first chemical vapor deposition process and the shape redressing treatment at least once until the thickness of the dielectric layer reaches to a predetermined value.

Method for fabricating a through-silicon via

First of all, a semiconductor substrate is provided, the semiconductor substrate has a dielectric layer thereon. Then a photoresist layer is formed and defined on the dielectric layer. Next, an etching process is performed by the photoresist layer as an etched mask to form a trench in the dielectric layer, wherein the etchant of the etching process comprises a mixing gas with a C F gas or a CH F gas, such as C F /CH F /Ar/O or C F /CH F /Ar/O /CF or C F /CH F /Ar/O /C F , accordingly, the etching capability of the etchant and the etching selectivity between the dielectric layer and the photoresist layer can be raised. Finally, the photoresist layer is removed to form the contact window or the via hole with high accurate critical dimension.

Etching process for forming the trench with high aspect ratio

A method of forming a dual damascene structure. A first dielectric layer is formed over a substrate, and then the first dielectric layer is planarized. The first dielectric layer is etched to form a dual damascene opening that includes a via opening and a trench. The via opening exposes a conductive layer in the substrate. A metallic is formed in the via openings and the trenches so that a metallic interconnect and a via are formed at the same time. A cap layer is formed on the metallic layer. An additional etching stop layer may form on the cap layer and the substrate. A second dielectric layer is formed over the substrate. The second dielectric layer is etched to form a via opening that exposes a portion of the cap layer.

Method for forming dual damascene structure

A method for forming a via hole provides a substrate, and a conducting layer is formed on the substrate. An intermetal dielectric layer is deposited conformal to the substrate, and a patterned photoresist is formed on the intermetal dielectric layer. The photoresist is used as a mask, and a portion of intermetal dielectric layer, which is not covered by the photoresist, is removed to expose the conducting layer, so that an opening is formed. A polymer layer is unavoidably formed on the surface of the opening, and then the photoresist and the polymer layer are removed. The residual polymer layer is removed by wet bench to form a via hole.

Method for forming via hole

The invention provides a method of manufacturing a metal interconnect. A substrate having a metal line formed thereon is provided. An anti-reflection layer is formed on the metal line. A dielectric layer with a relatively low dielectric constant is formed over the substrate. A patterned photoresist layer is formed on the dielectric layer. The patterned photoresist layer has an opening exposing a portion of the dielectric layer. The portion of the dielectric layer exposed by the opening is removed to form a via hole. The patterned photoresist layer is removed by an O.sub.2 --H.sub.2 O--CF.sub.4 plasma. The pressure of the O.sub.2 --H.sub.2 O--CF.sub.4 plasma is about 800-1000 torr. A cleaning process is performed by a post-stripper rinse solution and de-ionized water without using an acetone solution. A barrier layer is formed over the substrate by chemical vapor deposition. A metal nucleation is performed for a long time by chemical vapor deposition to form metal nuclei on the barrier layer. A metal layer is formed to fill the via hole by chemical vapor deposition.

Method of manufacturing interconnect

An improved method of fabricating an unlanded via hole on a semiconductor substrate is provided. A conductive line and a patterned anti-reflection coating layer are sequentially formed on the substrate wherein the patterned anti-reflection coating layer has a smaller width than the conductive line and a portion of the conductive layer is exposed by the patterned anti-reflection coating layer. A planarized dielectric layer is formed over the substrate to cover the patterned anti-reflection coating layer and the conductive line. A via hole is formed in the planarized dielectric layer to expose portions of surface and sidewalls of the patterned anti-reflection coating layer as well as the conductive line.

Method of forming unlanded via hole

Disclosed is a method of etching which makes the quantitative analysis possible and easier. In the prior art, chemical plasma etching is mainly by ion bombardment, and the tool used to observe the metal bulk is transmission electron microscopy (TEM), so it is very difficult and complicated to execute quantitative analysis. By using chemical plasma etching, the metal precipitate will be left almost all at the end of etching. Scanning electron microscopy (SEM) is used instead of TEM to perform the quantitative analysis.

Growing community of inventors

Hsinchu, Taiwan

Yueh-Feng Ho