Taiwan Semiconductor Manufacturing Comp. Ltd.

Promos Technologies, Inc

National Science Council

Other

Yueh-Chuan Lee

Chia-Chan Chen

Shih-Lung Chen

Ching-Fa Yeh

Kwo-Hau Wu

Ta-Hsin Chen

Chih-Huang Li

Shih-Hsien Huang

Ming-Sheng Tung

Ching-Heng Liu

Chih-Chuan Hsu

Shuo-Cheng Wang

Yuh-Ching Su

Chih-Chiang Chang

Jhy-Jyi Sze

Pu-Fang Chen

Jung-I Lin

Ren-Jie Lin

Tzo-Hung Luo

Hong-Long Chang

Hsiao-Lei Wang

Jason Chen

Ping-Chieh Chin

Hwei-Lin Chuang

Chien-Hsing Lin

Chin-Long Hung

A method is provided for forming a light-shielding layer to block irradiation of light onto a light-sensitive storage region. The light-sensitive storage region is formed in a semiconductor substrate to store electric charges. A storage gate feature is formed over the light-sensitive storage region, and includes a polysilicon gate electrode that is disposed over the light-sensitive storage region. A metal layer is formed over the storage gate feature. A silicidation process is performed to transform a part of the metal layer that is in contact with the polysilicon gate electrode into a silicide light-shielding layer. A thermal process is performed to induce lateral growth of the silicide light-shielding layer to make the silicide light-shielding layer extend to cover a lateral surface of the storage gate feature. A process temperature of the thermal process is higher than that of the silicidation process.

Photosensing pixel including self-aligned light shielding layer

The present disclosure relates to an integrated chip. The integrated chip includes a gate structure on a substrate. A doped region is within the substrate. One or more dielectric materials are within a recess formed by one or more surfaces of the substrate. The doped region is laterally between the gate structure and the recess. A doped epitaxial material is within the recess and between the one or more dielectric materials and the doped region. The doped epitaxial material is asymmetric about a vertical line that extends through a lateral center of the doped epitaxial material.

Image sensor with shallow trench edge doping

Apparatus and methods for effective impurity gettering are described herein. In some embodiments, a described device includes: a substrate; a pixel region disposed in the substrate; an isolation region disposed in the substrate and within a proximity of the pixel region; and a heterogeneous layer on the seed area. The isolation region comprises a seed area including a first semiconductor material. The heterogeneous layer comprises a second semiconductor material that has a lattice constant different from that of the first semiconductor material.

Apparatus and methods for effective impurity gettering

The present disclosure relates to an integrated chip. The integrated chip includes a photodetector region provided in a substrate. A dielectric material is disposed within a trench defined by one or more interior surfaces of the substrate. The trench has a depth that extends from an upper surface of the substrate to within the substrate. A doped silicon material is disposed within the trench and has a sidewall facing away from the doped silicon material. The sidewall contacts a sidewall of the dielectric material along an interface extending along the depth of the trench.

Some embodiments relate to a bond pad structure of an integrated circuit (IC). The bond structure includes a bond pad and an intervening metal layer positioned below the bond pad. The intervening metal layer has a first face and a second face. A first via layer is in contact with the first face of intervening metal layer. The first via layer has a first via pattern including a single via. The bond structure also includes a second via layer in contact with the second face of the intervening metal layer. The second via layer has a second via pattern that is different than first via pattern. The second via pattern includes a first via surrounding a second via. The first and second vias are concentric with one another about a central point of the second via layer.

Bond pad structure for bonding improvement

A semiconductor arrangement is provided. The semiconductor arrangement includes a first conductive element over a substrate and a second conductive element over the substrate. A dielectric region is over a top surface of the substrate and between the first conductive element and the second conductive element. An electrically conductive structure is over the first conductive element, the second conductive element, and the dielectric region.

Semiconductor arrangement and method for making

A photosensor device and the method of making the same are provided. In one embodiment, the device includes at least one pixel cell. The at least one pixel cell includes a substrate formed from a semiconductor material, and includes first and second photosensor regions. The first photosensor region is disposed in the substrate and includes a first dopant of a first conductivity type. The second photosensor region is disposed above the first photosensor region and includes a second dopant of a second conductivity type. The second photosensor region can have an increase in dopant concentration from an outer edge to a center portion therein.

Device comprising photodiode and method of making the same

The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip has a photodetector region arranged within a semiconductor substrate. One or more dielectric materials are disposed within a trench defined by one or more interior surfaces of the semiconductor substrate. A doped epitaxial material is arranged within the trench and is laterally between the one or more dielectric materials and the photodetector region. A dielectric protection layer is arranged over the one or more dielectric materials within the trench. The dielectric protection layer laterally contacts a sidewall of the doped epitaxial material.

The present disclosure relates to a method of forming an integrated chip. The method may be performed by selectively etching a substrate to define a trench. One or more dielectric materials are formed within the trench. A part of the one or more dielectric materials are removed from within the trench to expose a sidewall of the substrate defining the trench. A doped epitaxial material is formed along the sidewall of the substrate.

A method for forming an integrated circuit (IC) package is provided. In some embodiments, a semiconductor workpiece comprising a scribe line, a first IC die, a second IC die, and a passivation layer is formed. The scribe line separates the first and second IC dies, and the passivation layer covers the first and second IC dies. The first IC die comprises a circuit and a pad structure electrically coupled to the circuit. The pad structure comprises a first pad, a second pad, and a bridge. The bridge is within the scribe line and connects the first pad to the second pad. The passivation layer is patterned to expose the first pad, but not the second pad, and testing is performed on the circuit through the first pad. The semiconductor workpiece is cut along the scribe line to individualize the first and second IC dies, and to remove the bridge.

Protected chip-scale package (CSP) pad structure

Some embodiments relate to a bond pad structure of an integrated circuit (IC). The bond structure includes a bond pad and an intervening metal layer positioned below the bond pad. The intervening metal layer has a first face and a second face. A first via layer is in contact with the first face of intervening metal layer. The first via layer has a first via pattern. The bond structure also includes a second via layer in contact with the second face of the intervening metal layer. The second via layer has a second via pattern that is different than first via pattern. The second via pattern includes a first group of elongated vias extending in parallel with one another in a first direction and a second group of vias in between the first group of elongated vias. The second group of vias extend in a second direction orthogonal to the first direction.

In some embodiments, the present disclosure relates to a method of forming an integrated chip. The method includes doping a substrate to form a first well region having a first doping type, and selectively etching an upper surface of the substrate to define a trench extending into the first well region. The trench is filled with one or more dielectric materials. The substrate is implanted to form a first photodiode region within the substrate. The first photodiode region is separated from the trench by the first well region. A first part of the one or more dielectric materials is removed from within the trench to expose a sidewall of the substrate that defines the trench and that is proximate to the first photodiode region. A doped epitaxial material having the first doping type is formed along the sidewall of the substrate.

In some embodiments, the present disclosure relates to an integrated chip having a photodetector arranged within a semiconductor substrate having a first doping type. One or more dielectric materials are disposed within a trench defined by interior surfaces of the semiconductor substrate. A doped epitaxial material arranged within the trench at a location laterally between the one or more dielectric materials and the photodetector. The doped epitaxial material has a second doping type that is different than the first doping type.

Growing community of inventors

Hsinchu, Taiwan

Yueh-Chuan Lee