Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Yuecel Congar

Martin Richter

Martin Wackerle

Christoph Kutter

Sebastian Kibler

Christian Wald

Siegfried Roehl

Henry Leistner

Klaus Heinrich

Waltraud Hell

Lorenz Grünerbel

Agnes Bußmann

Siegfried Röhl

A method for producing a micropump includes, among others, a step of providing a substrate, wherein the substrate includes at least one pump diaphragm for the micropump. Additionally, a diaphragm actuator for moving the pump diaphragm is provided, wherein the diaphragm actuator is arranged in an holding device. The holding device is aligned relative to the substrate such that the diaphragm actuator is arranged opposite to the pump diaphragm and the pump diaphragm is deflected in the direction of the diaphragm actuator by means of a fluid pressure that is higher than the ambient pressure. Additionally, the diaphragm actuator is mounted on the pump diaphragm.

Method for producing a micropump with mechanically biased diaphragm actuator

According to an embodiment, a sensor arrangement comprises a first micropump, e.g. a microfluidic or peristaltic pump, having a normally closed (NC) safety valve, e.g. at the micropump output, a second micropump, e.g. microfluidic or peristaltic pump, having a normally closed (NC) safety valve, e.g. at the micropump output, and a sensor having a sensor chamber, e.g. a sensor cavity or sensor volume, with a sensor element, e.g. an active sensitive region or layer, in the sensor chamber, wherein the sensor is configured to provide a sensor output signal based on a condition of the fluid, e.g. a gas or liquid, in the sensor chamber. The sensor chamber of the sensor is fluidically coupled between the first and second micropump, and the first and second micropump are configured to provide a defined operation mode of the sensor arrangement based on the respective activation or operation condition of the first and second micropump for providing (1.) a defined negative fluid pressure in the sensor chamber, (2.) a defined positive fluid pressure in the sensor chamber or (3.) a defined fluid flow, e.g. fluid throughput, through the sensor chamber.

Sensor arrangement and method for sensing an amount or a concentration of a target fluid in a medium with the sensor arrangement

A microstructured fluid flow control device includes a substrate with a piezo-actuated first membrane arranged on a first substrate side, and a fluid channel that extends through the substrate between the first substrate side and an opposite second substrate side. In addition, the microstructured fluid flow control device includes a microvalve that extends through the fluid channel and is configured to close the fluid channel in an unactuated state, and a second membrane arranged on the first substrate side and spaced apart from the membrane and arranged between the fluid channel and the first piezo-actuated membrane. The second membrane is joined to the microvalve and is mechanically biased towards the first membrane so that a biasing force is applied to the microvalve, wherein the biasing force is part of a restoring force that causes the microvalve to close the fluid channel in an unactuated state.

Microstructured fluid flow control device

The invention relates to a combined pump-sensor arrangement having a substrate having a first main surface and an opposite second main surface. A package lid which defines a package having a measuring cavity is arranged on the first main surface of the substrate. Additionally, the pump-sensor arrangement has a micropump having a pump inlet and a pump outlet, the micropump being configured to suck in an analyte fluid present in the measuring cavity through the pump inlet and eject the same to an environment outside the measuring cavity via the pump outlet. Furthermore, the pump-sensor arrangement has a sensor for detecting at least one component of the analyte fluid present within the measuring cavity and movable by means of the micropump. In accordance with the invention, both the sensor and the micropump are commonly arranged on the first main surface of the substrate and within the measuring cavity.

Combined pump-sensor arrangement

The invention relates to a pump having a piezo diaphragm transducer arranged at a pump body of the pump, and to a method for producing a pump, wherein a piezo diaphragm transducer is mounted to a pump body, wherein the method, among other things, has providing a piezoceramic layer. In accordance with the invention, at least one piezo element is diced from the piezoceramic layer so that the at least one piezo element has a regular polygon shape having at least six corners. In addition, the method has forming the piezo diaphragm transducer by mounting the piezo element to a pump diaphragm.

Pump comprising a polygon-shaped piezo diaphragm transducer

The invention relates to a device having an opening defining a fluid connection between a fluid channel in the device and ambient air, a sensor coupled to the fluid channel, configured to sense at least one component of the ambient air, and a micro fluid actuator connected downstream of the sensor, configured, in the suction stroke, to suck in fluid through the fluid channel and to transport the same towards the sensor, and, in the pressure stroke, to transport the sucked-in fluid through said fluid channel back towards the opening. According to the invention, the sensor is arranged spaced apart from the opening, and the volume of the fluid channel between the sensor and the opening is equal to or smaller than the stroke volume which the micro fluid actuator may convey with a single suction stroke.

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Buchloe, Germany

Yuecel Congar