Industrial Technology Research Institute

Yue-Min Wan

Ching-Yi Wu

Ming-Jye Tsai

Ruei-Hung Jang

Cheng-Jien Peng

Raey-Shing Huang

Chun-Hsu Ke

Nan-Kuang Yao

Chi-Chen Chen

Shin-Hwan Wang

Lung-Yu Hung

Si-Wei Chang

A flow controller module comprising at least one micro flow sensor and a microvalve, integrated in a micro flow channel, is disclosed. The micro flow sensor comprises a pressure sensitive flow sensor. At the position of the micro flow sensor, the micro flow channel is provided with an orifice so that pressure of a flow may be enlarged to facilitate measurement of the flow speed. The microvalve comprises a silicon microbridge with a mesa structure and is driven by a voltage. The microvalve may operate under a normally closed mode or a normally open mode. Disclosed in this invention is also a flow sensor suited in the integrated flow controller module. Methods for preparing the flow sensor and the flow controller module are also disclosed.

Integrated flow controller module

A pneumatic apparatus and method for driving a microflow is disclosed. The microflow driving apparatus of this invention comprises an external pneumatic driving device that generates an array of airflows; an air gallery to accept airflows of said pneumatic driving device and to generate a suction force and an exclusion force; and a fluid channel connected with said air gallery to allow a fluid to flow inside it. In the air gallery, a trapezoid block is provided to generate an air circle from at least one of said airflows. An open gap is provided in the fluid channel at the connection of the air gallery and the fluid channel. When different combinations of airflows are introduced into the air gallery, a suction force or an exclusion force is generated to drive the reaction fluid inside the fluid channel to proceed, retreat or pause. A method using the apparatus for driving a microflow is also disclosed.

Apparatus and method for driving a microflow

A flow sensor comprises a heater module, a fluid temperature sensor and a Wheatstone bridge module. In the heater module, a heater is disposed very close to a heater temperature sensor and an insulation layer electrically isolates these two elements. The heater and the heater temperature sensor are disposed together on a floating membrane positioned normally to the fluid flow. The Wheatstone bridge module regulates electric current supplied to the heater, based on a constant temperature difference between the heater and the fluid, and provides voltage information of the electric current. A microprocessor converts the voltage information into velocity of fluid to be measured. A bypass channel is designed to adjust flow impedance of the fluid. Further disclosed is a fluid temperature sensor with the same design of the heater module whereby the factor of flow direction of the fluid may be ignored.

Integrated flow sensor

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Hsinchu, Taiwan

Yue-Min Wan