Tokyo Electron Limited

Yudai Ito

Kazuya Dobashi

Misako Saito

Hideki Nishimura

Shigeyoshi Kojima

Disclosed is a method for removing metal contamination present on an inner wall of a fluorine-based resin used in a chemical liquid supply line that supplies a chemical liquid to a workpiece. The method includes bringing some or all of a cleaning material reactive to a metal forming the metal contamination into a gaseous state; supplying the gaseous cleaning material to the chemical liquid supply line; and removing the metal contamination by reacting the gaseous cleaning material with the metal contamination present on the inner wall of the fluorine-based resin used in the chemical liquid supply line.

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Yamanashi, Japan

Yudai Ito