Thk Co., Ltd.

Advanced Semiconductor Manufacturing Co. Ltd.

Yuanjun Xu

Yoshinobu Tanaka

Toshiyuki Aso

Hiroshi Kaneshige

Akihiro Teramachi

Weijia Xue

Yilin Yan

There is provided a method for forming a composite cavity and a composite cavity formed using the method. The method comprises the following steps: providing a silicon substrate (); forming an oxide layer on the front side thereof; patterning the oxide layer to form one or more grooves (), the position of the groove () corresponding to the position of small cavity () to be formed; providing a bonding wafer (), which is bonded to the patterned oxide layer to form one or more closed micro-cavity structures () between the silicon substrate () and the bonding wafer (); forming a protective film () over the bonding wafer () and forming a masking layer () on the back side of the silicon substrate (); patterning the masking layer (), the pattern of the masking layer () corresponding to the position of a large cavity () to be formed; using the masking layer () as a mask, etching the silicon substrate () from the back side until the oxide layer at the front side thereof to form the large cavity () in the silicon substrate (); and using the masking layer () and the oxide layer as a mask, etching the bonding wafer () from the back side through the silicon substrate () until the protective film () thereover to form one or more small cavities () in the bonding wafer (). The uniformity of thickness of the semiconductor medium layer where the small cavity () in the composite cavity is located is well controlled by the present invention.

Composite cavity and forming method thereof

A track rail is formed in a channel-like configuration while having a guide passage for sliders. A table structure that moves within the guide passage includes: a pair of sliders that move forwards and backwards within the guide passage; and a connecting top board connecting those sliders to each other with a predetermined interval therebetween and provided with a mounting surface for a movable member. An armature constituting a linear motor is received between the pair of sliders, and field magnets constituting the linear motor are arranged in the track rail so as to face the guide passage. The armature and the field magnets, which constitute the linear motor, are completely integrated with the table structure and the track rail, which constitute a linear guide, and are entirely contained inside the linear guide.

Linear motor actuator

Growing community of inventors

Shanghai, China

Yuanjun Xu