Industrial Technology Research Institute

Yuan-Yuan Chiang

Fu-Ching Tung

Kuan-Chou Chen

Chia-Jui Hu

Shao-Yu Lee

Peter L Mahneke

Janathan Wang

A sensing device and a driving module for an electric bicycle having a spindle are provided. The sensing device includes a torque sensor, a slip ring, a grating, and a cadence sensor. The driving module includes a motor, a reducer and the sensing device. The present disclosure combines the slip ring with the grating to integrate the cadence sensor and the torque sensor into one sensing device, such that the sizes of the sensing device and the driving module are reduced.

Sensing device and driving module for electric bicycle

A power-delivery mechanism is provided in the present invention, which utilizes an element with airtight and flexible characteristics coupled to a power-generating unit so as to generate a motion in a specific direction. Besides, an apparatus of plasma -enhanced chemical vapor deposition (PECVD) is also provided in the present invention, which comprises the power-delivery mechanism to load/unload a workpiece onto a stage for processing automatically. Meanwhile, the present invention also provides a height-adjusting unit and a position-indicating unit allowing the operator to adjust the distance between an upper electrode and a lower electrode of the PECVD so that the operator is capable of monitoring and adjusting the distance easily between the upper electrode and the lower electrode outside the chamber of the PECVD.

Power-delivery mechanism and apparatus of plasma-enhanced chemical vapor deposition using the same

The present invention describes a chemical solution recycling apparatus in a spin etching and cleaning process chamber for manufacturing semiconductor devices. Modification of the exterior dimension and the main structure of the process chamber is not necessary. The recycling apparatus in accordance with the present invention may separate different chemical solutions into different vessels and recycle them thereafter. The recycling apparatus comprises a recycling ring moving up and down to collect the solution and a recycling circular tray for sorting the chemical solutions in different trenches and drains. Therefore, the chemical solutions may be collected by assigned vessels or may be recycled into the process chamber after necessary quality inspections.

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Taichung, Taiwan

Yuan-Yuan Chiang