Chinese Academy of Sciences

Yangtze Memory Technologies Co., Ltd.

Wuhan Tianma Micro-electronics Co., Ltd

Wuhan Tianma Microelectronics Co., Ltd. Shanghai Branch

Yuan Li

Jun Ma

Lijing Han

Lei Liu

Yu Xin

Qiang Xue

Yong Wan

Jiangshan Li

Naichao Mu

Zhixiang Chen

Mingli Wei

Peng Zhou

Yijun Chen

Rui Song

Ge Mao

Shuliang Lv

A mask module includes a framework, a first strip plate fixed on the framework and extending along a first direction, and a first mask. The first mask is located on a side, deviating from the framework, of the first strip plate. The first mask includes at least one preset area, and the preset area includes at least one opening area. The first strip plate is provided with a first concave-convex structure on one side edge along the first direction. At least one convex structure is provided in a middle of the first concave-convex structure along the first direction. In a direction perpendicular to a surface of the first mask, the first concave-convex structure and the convex structure cover at least a part of area of the at least one opening of the preset area. The convex structure and the first strip plate are integrally formed.

Mask device and evaporation device

A multiphase flow cylindrical model test system includes a loading structure, a multiphase flow displacement model bucket, a data acquisition and analysis system, a flexible seepage model bucket and a dynamic control system. A multi-parameter test method in the displacement process of pollutants in three-dimensional multi-field and multiphase media is reasonably configured based on the sequential and superimposed application requirements of heat and steam in the thermal enhanced soil vapor extraction process. The disclosure has the following effects: it can conduct array-type measurement of deformation of specimen during the thermal enhanced soil vapor extraction process, measure the temperature field, conductivity field, moisture field, matrix suction distribution, soil pressure distribution, pore water pressure distribution and pollutant discharge rate of the specimen during the test, and realize the flexible wall permeability triaxial test with bidirectional control of the water head and overcome the influence of the polluted liquid on the test equipment.

Multiphase flow cylindrical model test system and test method

A method for forming a barrier layer in a semiconductor structure is disclosed. A substrate having a dielectric layer is provided. The dielectric layer is exposed to a precursor having a first metal, and a first ammonia treatment is performed. A first purge operation is performed, a second ammonia treatment is performed after the first purge operation, and a second purge operation is performed after the second ammonia treatment to form the barrier layer on the dielectric layer.

Method for forming barrier layer in semiconductor structure

Growing community of inventors

Wuhan, China

Yuan Li