Taiwan Semiconductor Manufacturing Comp. Ltd.

Yu-Ying Hsu

Bao-Ru Young

Harry-Hak-Lay Chuang

Kong-Beng Thei

Lee-Wee Teo

Chiung-Han Yeh

Sheng-Chen Chung

Tzu-Heng Chang

Ming-Hsiang Song

Jen-Chou Tseng

Jam-Wem Lee

Jin-Aun Ng

Taede Smedes

Sin-Hua Wu

Johannes Van Zwol

Chi-Ju Lee

Yu-Ti Su

Li-Wei Chu

Harry Hak-Lay Chuang

The present disclosure provides an integrated circuit. The integrated circuit includes a semiconductor substrate; and a passive polysilicon device disposed over the semiconductor substrate. The passive polysilicon device further includes a polysilicon feature; and a plurality of electrodes embedded in the polysilicon feature.

Polysilicon design for replacement gate technology

One or more electrostatic discharge (ESD) control circuit are disclosed herein. In an embodiment, an ESD control circuit has first and second trigger transistors, first and second ESD transistors, and first and second feedback transistors. The ESD transistors provide ESD current paths for ESD current generated during an ESD event. The first and second trigger transistors are on during normal operation to maintain the ESD transistors in an off state. During an ESD event, the first and second transistors are turned off to enable the first and second ESD transistors to provide ESD current paths. The first and second feedback transistors turn on during an ESD event to reinforce the on state of the ESD transistors and to reinforce the off state of the trigger transistors. In this way, the ESD control circuit stably provides multiple ESD current paths to discharge ESD current.

Electrostatic discharge (ESD) control circuit

Methods and apparatus for ESD structures. A semiconductor device includes a first active area containing an ESD cell coupled to a first terminal and disposed in a well; a second active area in the semiconductor substrate, the second active area comprising a first diffusion of the first conductivity type for making a bulk contact to the well; and a third active area in the semiconductor substrate, separated from the first and second active areas by another isolation region, a portion of the third active area comprising an implant diffusion of the first conductivity type within a first diffusion of the second conductivity type and adjacent a boundary with the well of the first conductivity type; wherein the third active area comprises a diode coupled to the terminal and reverse biased with respect to the well of the first conductivity type.

Methods and apparatus for ESD structures

An ESD protection circuit includes at least a first and a second silicon controlled rectifier (SCR) circuits. The first SCR circuit is coupled between the pad and the positive power supply terminal. The second SCR circuit is coupled between the pad and the ground terminal. At least one of the SCR circuits is configured to selectively provide a short or relatively conductive electrical path between the pad and one of the positive power supply terminal and the ground terminal.

Bidirectional dual-SCR circuit for ESD protection

An ESD protection circuit includes a pad of an IC, circuitry coupled to the pad for buffering data, an RC power clamp on the IC, and first and second silicon controlled rectifier (SCR) circuits. The RC power clamp is coupled between a positive power supply terminal and a ground terminal. The first SCR circuit is coupled between the pad and the positive power supply terminal. The first SCR circuit has a first trigger input coupled to the RC power clamp circuit. The second SCR circuit is coupled between the pad and the ground terminal. The second SCR circuit has a second trigger input coupled to the RC power clamp circuit. At least one of the SCR circuits includes a gated diode configured to selectively provide a short or relatively conductive electrical path between the pad and one of the positive power supply terminal and the ground terminal.

The embodiments of methods described in this disclosure for trimming back nitride spacers for replacement gates allows the hard mask layers (or hard mask) to protect the polysilicon above the high-K dielectric during trim back process. The process sequence also allows determining the trim-back amount based on the process uniformity (or control) of nitride deposition and nitride etchback (or trimming) processes. Nitride spacer trim-back process integration is critical to avoid creating undesirable consequences, such as silicided polyisicon on top of high-K dielectric described above. The integrated process also allows widening the space between the gate structures to allow formation of silicide with good quality and allow contact plugs to have sufficient contact with the silicide regions. The silicide with good quality and good contact between the contact plugs and the silicide regions increase the yield of contact and allows the contact resistance to be in acceptable and workable ranges.

Method for main spacer trim-back

Main spacer trim-back method for replacement gate process

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Pingzhen, Taiwan

Yu-Ying Hsu