Taiwan Semiconductor Manufacturing Comp. Ltd.

Yu-Yen Chang

Kuo-Chen Lin

Chih-Hung Huang

Chung-Yi Lee

Ching-Chiang Chang

Pei-Yi Kuo

Kuo-Cheng Lin

A platform for securely mounting a wafer cassette holder thereon is provided which includes a wafer cassette holder that has a flat bottom surface and four sidewall panels, a platform that has a flat top surface larger than and for mating to the flat bottom surface of the wafer cassette holder, And a securing device mounted in the flat top surface of the platform juxtaposed to each side of the four sidewalls of the wafer cassette holder for preventing the holder from accidentally slipping off the platform, the securing device may include either a plurality of engagement pins that slidingly engages the wafer cassette holder for securely holding the holder on the platform, or a plurality of side panels mounted along the peripheral edge of the platform for preventing the holder from slipping off the platform.

Paddle for securely mounting a wafer cassette holder thereto

Within both a stocker apparatus and a method for operating the stocker apparatus there is employed: (1) a minimum of six input/output ports; (2) an array of storage locations for storing an array of work in process (WIP) product units; and (3) a random access transportation means for transporting a work in process (WIP) product unit at least bidirectionally between the minimum of six input/output ports and a storage location within the array of storage locations. Within the stocker apparatus and the method, the minimum of six input/output ports provides for more efficient operation of the stocker apparatus.

Stocker apparatus with increased input/output capacity

The SMIF pod includes a base having a cassette that may receive one or more wafers in preparation for transferring the wafers. The base includes a plurality of first openings formed on the side surfaces for a latch mechanism. The base includes a window formed on a surface of the base for an operator to read the state of the container. A box having second openings one to one corresponding to said first openings for the latch mechanism with latch member to penetrate through them while in the lock state. An indicator presents a first mark for indicating the locked state at the window or presents a second mark at the window for indicating the unlocked state.

Transportable container having an indicator

Within both a stocker apparatus and a method for operating the stocker apparatus there is employed, in addition to: (1) a minimum of one input/output port; (2) an array of storage locations for storing an array of work in process (WIP) product units; and (3) a random access transportation means for transporting a work in process (WIP) product unit at least bidirectionally between the minimum of one input/output port and a storage location within the array of storage locations; (4) a controller for controlling the random access transportation means. Within the stocker apparatus and the method, the controller is programmed such that upon unavailability of the minimum of one input/output port and upon concurrent receipt of a request to retrieve a work in process (WIP) product unit stored within the array of storage locations to reposition the requested work in process (WIP) product unit to a designated storage location within the array of storage locations where it may be manually retrieved.

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Taipei, Taiwan

Yu-Yen Chang