Intel Corporation

Yu-Wen Huang

Jack T Kavalieros

Tahir Ghani

Van H Le

Abhishek A Sharma

Bernhard Sell

Fatih Hamzaoglu

Pei-Hua Wang

Chieh-Jen Ku

Travis W LaJoie

Shem Ogadhoh

Allen B Gardiner

Juan G Alzate Vinasco

Umut Arslan

Nikhil Mehta

Shu Zhou

Akash Garg

Gregory George

Julie Rollins

Jared Stoeger

Embodiments herein describe techniques for a semiconductor device including a substrate, a first inter-level dielectric (ILD) layer above the substrate, and a second ILD layer above the first ILD layer. A first capacitor and a second capacitor are formed within the first ILD layer and the second ILD layer. A first top plate of the first capacitor and a second top plate of the second capacitor are formed at a boundary between the first ILD layer and the second ILD layer. The first capacitor and the second capacitor are separated by a dielectric area in the first ILD layer. The dielectric area includes a first dielectric area that is coplanar with the first top plate or the second top plate, and a second dielectric area above the first dielectric area and to separate the first top plate and the second top plate. Other embodiments may be described and/or claimed.

Capacitor separations in dielectric layers

Embodiments herein describe techniques for a semiconductor device including a substrate. A first capacitor includes a first top plate and a first bottom plate above the substrate. The first top plate is coupled to a first metal electrode within an inter-level dielectric (ILD) layer to access the first capacitor. A second capacitor includes a second top plate and a second bottom plate, where the second top plate is coupled to a second metal electrode within the ILD layer to access the second capacitor. The second metal electrode is disjoint from the first metal electrode. The first capacitor is accessed through the first metal electrode without accessing the second capacitor through the second metal electrode. Other embodiments may be described and/or claimed.

Capacitor connections in dielectric layers

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Beaverton, OR, United States of America

Yu-Wen Huang