Motorola Corporation

Freescale Semiconductor,inc.

Yu Wang

Ravindranath Droopad

Zhiyi Jimmy Yu

Kurt W Eisenbeiser

Jeffrey M Finder

Ramoothy Ramesh

Ramamoorthy Ramesh

A high quality epitaxial layer of monocrystalline Pb(Zr,Ti)O can be grown overlying large silicon wafers by first growing an strontium titanate layer on a silicon wafer. The strontium titanate layer is a monocrystalline layer spaced apart from the silicon wafer by an amorphous interface layer of silicon oxide.

Microelectronic piezoelectric structure and method of forming the same

A high quality epitaxial layer of monocrystalline Pb(Mg,Nb)O &mdash;PbTiO or Pb(Mg Nb )O &mdash;PbTiO can be grown overlying large silicon wafers by first growing an strontium titanate layer on a silicon wafer. The strontium titanate layer is a monocrystalline layer spaced apart from the silicon wafer by an amorphous interface layer of silicon oxide.

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Greenbelt, MD, United States of America

Yu Wang