Average Co-Inventor Count = 12.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limi Ted (1 from 101 patents)
1 patent:
1. 10867814 - Liquid processing method, substrate processing apparatus, and storage medium