United Microelectronics Corp.

Yu-Tsung Lin

Ming-I Wang

Hung-Chao Kao

Hsin-Ping Wu

Kuo-Yuh Yang

Chi-Chung Chen

Wen-Chen Chiang

An image sensor with at least one correcting lens and a method for fabricating the same are described. The image sensor includes a substrate with an array of microlenses thereon and at least one correcting lens disposed over the substrate covering the microlens array. In the fabricating method, a substrate having formed with a microlens array thereon is provided, and then at least one correcting lens is disposed over the substrate covering the microlens array. The at least one correcting lens can, in use of the image sensor, shift the incident direction of light to a microlens in edge parts of the array of microlenses toward the normal line direction of the image sensor.

Image sensor with correcting lens and fabrication thereof

The present disclosure provides a contiguous microlens array, which consists of a plurality of touching microlenses, wherein the adjacent microlenses are connected to each other to form a contiguous microlens array and curvatures of every angle cross section of each microlens are the same. The shape of the curved surface of a microlens in the microlens array is selectively adjusted according to its position in the array and the incident angle of light incident thereto.

Contiguous microlens array

A backside-illuminated image sensor and a fabricating method thereof are provided. The fabricating method includes the following steps. Firstly, a first substrate having a first side and a second side is provided, wherein a sensing structure is formed on the first side of the first substrate, and the sensing structure includes an alignment mark. Then, a second substrate is provided and bonded to the first side of the first substrate. Then, a light-transmissible structure is formed on the second side of the first substrate at a location corresponding to the alignment mark. Afterwards, an optical structure is positioned on the second side of the first substrate by referring to the light-transmissible structure and the alignment mark.

Backside-illuminated image sensor and fabricating method thereof

A method of fabricating a contiguous microlens array is disclosed. First, an array of photoresist patterns is formed, wherein each photoresist pattern has a substantially circular or polygonal shape in a top view and neighboring photoresist patterns are connected with each other or close to each other. Then a reflow step is performed to heat the photoresist patterns thereby rounding a surface of each photoresist pattern and connecting the neighboring photoresist patterns that are close to each other. Finally, a fixing step is performed to fix a shape of each photoresist pattern. The shape of the curved surface of a microlens in the microlens array is selectively adjusted according to its position in the array and the incident angle of light incident thereto.

Method of fabricating contiguous microlens array

A method for fabricating image sensor is disclosed. The method includes the steps of: providing a substrate, wherein the substrate comprises a plurality of photodiodes; forming at least one dielectric layer and a passivation layer on surface of the substrate; using a patterned photomask to perform a first pattern transfer process for forming a plurality of trenches corresponding to each photodiode in the passivation layer; forming a plurality of color filters in the trenches; covering a planarizing layer on the color filters; and using the patterned photomask to perform a second pattern transfer process for forming a plurality of microlenses corresponding to each color filter on the planarizing layer.

Image sensor and method for fabricating the same

A contiguous microlens array including a plurality of contiguous microlenses is described. Each microlens has substantially circular contours at the heights higher than the connection sections of the microlens with neighboring microlenses, and has substantially partially circular contours at the heights on the connection sections adjacent to the neighboring microlenses. The shape of the curved surface of a microlens in the microlens array is selectively adjusted according to its position in the array and the incident angle of light incident thereto.

Growing community of inventors

Taichung County, Taiwan

Yu-Tsung Lin