Samsung Electronics Co., Ltd.

Yu Sin Kim

Doug Yong Sung

Se Jin Oh

Yun Kwang Jeon

Kul Inn

Tae Kyun Kang

Chan Bin Mo

Seung Bin Ahn

Jae Ik Kim

A semiconductor substrate measuring apparatus includes a light source unit generating irradiation light including light in a first wavelength band and light in a second wavelength band. An optical unit irradiates the irradiation light on a measurement object and condenses reflected light. A light splitting unit splits the reflected light, condensed in the optical unit, into a first optical path and a second optical path. A first detecting unit is disposed on the first optical path and detects first interference light in the first wavelength band in the reflected light. A second detecting unit is disposed on the second optical path and detects second interference light in the second wavelength band in the reflected light. A controlling unit calculates at least one of a surface shape or a thickness of the measurement object. The controlling unit calculates a temperature of the measurement object.

Semiconductor substrate measuring apparatus and plasma treatment apparatus using the same

Growing community of inventors

Hwaseong-si, South Korea

Yu Sin Kim