Seiko Epson Corporation

Yu Shiozawa

Motoki Takabe

Eiju Hirai

Hitoshi Takaai

Masaki Mori

Takahiro Kanegae

Noritaka Ide

Shohei Mizuta

Shoichiro Yokoo

Jingling Wang

Michiya Kubokawa

A liquid ejecting head includes: a nozzle substrate having a nozzle configured to eject liquid; a pressure chamber substrate having a pressure chamber in which a pressure for ejecting liquid through the nozzle is applied to liquid and an absorption chamber adjacent to an upstream portion of the pressure chamber and configured to absorb vibration of liquid that occurs when a pressure is applied to the liquid in the pressure chamber; a first piezoelectric element associated with the pressure chamber and configured to be driven by voltage application; and a second piezoelectric element associated with the absorption chamber and configured to be driven independently of the first piezoelectric element by voltage application.

Liquid ejecting head and liquid ejecting apparatus

a first compliance portion provided at a position on the first side of a coupling area in the common flow path where the common flow path is coupled to the plurality of individual flow paths; and a second compliance portion, different from the first compliance portion, provided at a position on a second side of the coupling area in the common flow path, the second side being the other side in the second direction and being opposite to the first side, and the first compliance portion and the second compliance portion have an overlapping portion where the first compliance portion and the second compliance portion partially overlap each other as viewed in the second direction.

The controller drives the piezoelectric body such that, when the cumulative number of times of the driving is a second number of times greater than the first number of times, the voltage difference is a second value smaller than the first value.

Liquid ejecting apparatus

A liquid discharge device has a liquid discharge head that includes a pressure chamber substrate provided with a first pressure chamber in which a liquid is accommodated, a first piezoelectric body provided to correspond to the first pressure chamber, and a detection resistor for detecting a temperature in a vicinity of the first pressure chamber, and a decision section that decides a degree of deterioration of the first piezoelectric body based on a detection result of the detection resistor.

Liquid discharge device and system

A liquid ejecting apparatus includes: a channel substrate having one or more pressure chambers, an absorbing chamber that absorbs vibration of a liquid; a vibration plate that is stacked on the channel substrate; a first piezoelectric element that is provided on a first surface of the vibration plate, which is on a side opposite to a side on which the pressure chamber is present, at a position overlapping the pressure chamber when viewed and that vibrates the vibration plate to apply pressure to the liquid; a second piezoelectric element that is provided on the first surface of the vibration plate at a position overlapping the absorbing chamber and that deforms to absorb the vibration of the liquid propagated from the pressure chamber; and a pressure detecting section that detects, based on an electromotive force of the second piezoelectric element, pressure of the liquid in the absorbing chamber.

A liquid discharge head includes a pressure chamber substrate that has a plurality of pressure chambers, a piezoelectric element that is laminated at the pressure chamber substrate, and has an individual electrode individually provided for each of the plurality of pressure chambers, a common electrode commonly provided for the plurality of pressure chambers, and a piezoelectric body provided between the individual electrode and the common electrode in a lamination direction of the piezoelectric element and provided to apply pressure to a liquid in the pressure chamber, a drive wiring that is electrically coupled to the individual electrode and the common electrode, and provided to apply a voltage for driving the piezoelectric body to the piezoelectric body, and a heating resistor that is formed of the same material as any of the individual electrode, the common electrode, and the drive wiring, and provided to heat the liquid in the pressure chamber.

Liquid discharge head and liquid discharge device

A liquid discharge head includes an individual electrode that is individually provided for the plurality of pressure chambers, a common electrode that is commonly provided for the plurality of pressure chambers, a piezoelectric body that is provided between the individual electrode and the common electrode for applying pressure to liquid in the pressure chambers, a drive wiring that is electrically coupled to the individual electrode and the common electrode, and applies a voltage for driving the piezoelectric body, a detection resistor that is formed of the same material as any of the individual electrode, the common electrode, and the drive wiring for detecting temperature of the liquid in the pressure chambers, and a first layer that is provided on a surface opposite to a surface facing the pressure chamber substrate in the detection resistor, and has a lower thermal conductivity than the detection resistor.

A liquid discharge head includes an individual electrode, a common electrode, a piezoelectric body that is provided between the individual electrode and the common electrode for applying pressure to liquid in the pressure chambers, a drive wiring that applies a voltage so as to drive the piezoelectric body, a detection resistor that is formed of the same material as any of the individual electrode, the common electrode, and the drive wiring for detecting temperature of the liquid in the pressure chambers, and a sealing substrate that has a wall portion and a ceiling portion, and protects the piezoelectric body by the wall portion and the ceiling portion. The detection resistor is provided to have a part overlapping the wall portion which is shorter than a part not overlapping the wall portion when viewed along a lamination direction of the piezoelectric body, the individual electrode, and the common electrode.

A bonding substrate is provided with nozzle communication channels that establish communication between pressure chambers and nozzles. Each nozzle communication channel includes a pair of first inner wall surfaces constituting wall surfaces in a first direction, and a pair of second inner wall surfaces constituting wall surfaces in a second direction being orthogonal to the first direction. At least one of the second inner wall surfaces includes an inclined surface being inclined such that a length of the nozzle communication channel becomes gradually shorter toward the nozzle. An angle of the inclined surface relative to a liquid ejecting surface where the nozzles are opened is smaller than an angle of the first inner wall surface relative to the liquid ejecting surface.

Liquid ejecting head, liquid ejecting apparatus, and method of manufacturing liquid ejecting head

A MEMS device includes a first substrateincluding a single-crystal silicon substrate and a second substrateincluding a single-crystal silicon substrate, in which the first substrateand the second substrateare laminated together, and the first substrateand the second substrateare joined to each other such that the cleavage directions of both substrates intersect each other.

MEMS device, liquid ejecting head, and liquid ejecting apparatus

A liquid ejecting head includes: a nozzle; a pressure chamber; a supply flow channel which is located on one side in a first direction relative to the pressure chamber and through which a liquid is supplied to the pressure chamber; a discharge flow channel which is located on another side in the first direction relative to the pressure chamber and through which the liquid is discharged from the pressure chamber; a supply-side compliance substrate which absorbs a vibration of the liquid in the supply flow channel; and a discharge-side compliance substrate which absorbs a vibration of the liquid in the discharge flow channel. A length of the discharge-side compliance substrate in the first direction is shorter than a length of the supply-side compliance substrate in the first direction.

A liquid discharge head includes a pressure chamber substrate that is provided with a plurality of pressure chambers, a piezoelectric body that is driven to apply pressure to liquid in the pressure chambers, an upper electrode that is provided above the piezoelectric body for applying a voltage to the piezoelectric body, a lower electrode that is provided below the piezoelectric body for applying a voltage to the piezoelectric body, a detection resistor that is provided below the piezoelectric body for detecting temperature of the liquid in the pressure chambers, and a first wiring portion that is electrically coupled to the detection resistor. The first wiring portion includes a first part that is extended above the piezoelectric body, and a second part that is provided in at least a part of a through hole penetrating the piezoelectric body and electrically coupled to the detection resistor.

A distance between the first circuit and the second circuit is a first distance, a distance between the first circuit and the temperature detection circuit is a second distance longer than the first distance, and a distance between the second circuit and the temperature detection circuit is a third distance longer than the first distance.

Liquid discharge head unit and liquid discharge device

A liquid ejecting head includes a piezoelectric device including a first electrode, a second electrode, and a piezoelectric layer, a vibration plate that is deformed when the piezoelectric device is driven, a pressure chamber plate including a pressure chamber whose volume is changed by deformation of the vibration plate, a wiring board, an individual lead electrode through which the wiring board and the first electrode are electrically coupled to each other, a common lead electrode through which the wiring board and the second electrode are electrically coupled to each other, and a resistance wire electrically coupled to the wiring board and used to determine temperature in the pressure chamber.

In this liquid ejecting head, the pressure chamber extends in a second direction crossing a first direction, the first direction being a direction from the pressure chamber to the nozzle. The pressure chamber and the absorbing chamber are disposed at a same position in the first direction and next to each other in the second direction. The actuator is disposed on an opposite side in the first direction with respect to the pressure chamber. The absorption member is disposed on the opposite side in the first direction with respect to the absorbing chamber, the absorption member including at least part of members constituting the actuator.

Growing community of inventors

Shiojiri, Japan

Yu Shiozawa