Taiwan Semiconductor Manufacturing Comp. Ltd.

Yu-shan Yeh

Neng-Jye Yang

Meng-Hsien Li

Li-min Chen

Ying-Hsin Hung

A semiconductor structure includes a semiconductor substrate, a dielectric layer, a tungsten plug, a conductive plug, and a contact barrier. The dielectric layer is over a semiconductor substrate. The tungsten plug is in the dielectric layer. The conductive plug is on the tungsten plug. The contact barrier includes a sidewall barrier on a sidewall of the conductive plug and a bottom barrier between the conductive plug and the tungsten plug. A thickness of the sidewall barrier is greater than a thickness of the bottom barrier.

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HSINCHU COUNTY, Taiwan

Yu-shan Yeh