Taiwan Semiconductor Manufacturing Comp. Ltd.

Yu-Lin Wei

Chi-Feng Huang

Victor Chiang Liang

Fu-Huan Tsai

Fang-Ting Kuo

Meng-Chang Ho

Tse-Hua Lu

Shu Fang Fu

Tsun-Lai Hsu

Fredrik Ramberg

A low noise device includes an isolation feature in a substrate. The low noise device further includes a gate stack over a channel in the substrate, wherein the isolation feature is adjacent to the channel. The low noise device further includes a spacer surrounding a portion of the gate stack, wherein an edge of the gate stack is spaced from an edge of the isolation feature adjacent to the spacer by a distance ranging from a minimum spacing distance to about 0.3 microns (&#x3bc;m).

Semiconductor device and method of forming the same

A semiconductor device includes a substrate and an isolation feature. The isolation feature includes a first portion in the substrate, and a second portion extending along a top surface of the substrate, wherein a bottom surface of the second portion is below the top surface of the substrate. The semiconductor device further includes a gate structure over the substrate, wherein the gate structure extends along a top surface of the second portion of the isolation feature.

A method of making a semiconductor device includes etching a substrate to define a trench in a substrate, wherein the trench is adjacent to an active region in the substrate, and etching the substrate includes patterning a mask. The method further includes partially removing the mask to expose a first portion of the active region, wherein the first portion extends a first distance from the trench. The method further includes depositing a dielectric material to fill the trench and cover the first portion of the active region. The method further includes removing the mask, wherein the removing of the mask includes maintaining the dielectric material covering the first portion of the active region. The method further includes forming a gate structure over the active region and over the dielectric material.

Method of making a semiconductor device

A semiconductor device includes a substrate, wherein the substrate includes a channel region. The semiconductor device further includes an isolation feature in the substrate. The isolation feature includes a first portion in the substrate, and a second portion extending along a top surface of the substrate. The second portion partially covers the channel region. The semiconductor device further includes a gate structure over the substrate, wherein the gate structure partially covers the second portion of the isolation feature.

A low noise device includes an isolation feature in a substrate. The low noise device further includes a gate stack over a channel in the substrate. The gate stack includes a gate dielectric layer extending over a portion of the isolation feature, and a gate electrode over the gate dielectric layer. The low noise device further includes a charge trapping reducing structure adjacent to the isolation feature. The charge trapping reducing structure is configured to reduce a number of charge carriers adjacent an interface between the isolation feature and the channel.

Low noise device and method of forming the same

Transistors, methods of manufacturing thereof, and image sensor circuits are disclosed. In one embodiment, a transistor includes a buried channel disposed in a workpiece, a gate dielectric disposed over the buried channel, and a gate layer disposed over the gate dielectric. The gate layer comprises an I shape in a top view of the transistor.

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Taichung, Taiwan

Yu-Lin Wei