Taiwan Semiconductor Manufacturing Comp. Ltd.

Yu-Lin Sung

Yi-Wei Chiu

Tzu-Chan Weng

Meng-Je Chuang

A semiconductor device, method, and tool of manufacture includes a semiconductor manufacturing tool. The semiconductor manufacturing tool includes push pins in a chuck and an edge ring over the chuck. The push pins are configured to hold a wafer, and are operable to vary a height of the wafer with respect to the chuck. The edge ring has a first width at a base proximate the chuck, and a second width at a point distal the chuck. The first width is greater than the second width. A distance from the wafer to the edge ring varies when the push pins vary the height of the wafer with respect to the chuck.

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Taoyuan, Taiwan

Yu-Lin Sung