Taiwan Semiconductor Manufacturing Comp. Ltd.

Yu-Jye Lan

Kuan Liang Wu

Shiaw-Lin Chi

Wei-Chin Shiau

Chen Hsin Hsiung

Chia Hui Hsu

Wen Jen Chiu

Ming Tsang Yu

The present invention provides an Intelligent Engineering Data Analysis (I-EDA) system and method to help prevent low wafer yield and prevent occurrences of abnormal events. The I-EDA has a non-conforming wafer tracing (NCWT) system that operates to correlate occurrences of abnormal events with low wafer yield. The method generally has the steps of performing a fabrication operation on wafers disposed within a wafer lot; determining if an abnormal event occurred while performing the fabrication operation on the wafers disposed within the wafer lot; using a NCWT to determine a statistical correlation between an occurrence of an abnormal event and a wafer yield of the wafers being processed during the occurrence of the abnormal event if the abnormal event occurred during processing of the wafers disposed within the wafer lot; and using the determined statistical correlation to analyze the fabrication process and thereby improve wafer yield.

System and method to analyze low yield of wafers caused by abnormal lot events

Growing community of inventors

Taipei, Taiwan

Yu-Jye Lan