Samsung Electronics Co., Ltd.

Yu-jin Ahn

Jong-cheol Shin

Min-ji Jung

Min-young Jung

Chang-rok Moon

Sang-Jun Choi

Duck-Hyung Lee

Eun-Kyung Park

An image sensor includes a substrate including a sensor array area, a pad area, and a circuit area, a wiring layer on the pad area, and a light-shielding pattern on the sensor array area. The sensor array area includes a first area including active pixels and a second area including optical back pixels. The wiring layer is apart from the substrate by a first distance on the pad area. The light-shielding pattern includes a first portion spaced apart from the substrate by a second distance less than the first distance, a second portion disposed between the first portion and the wiring layer and extending on the same level as the wiring layer, and a third portion disposed between the first portion and the second portion and integrally formed with the first portion and the second portion.

Image sensor including planar boundary between optical black and active pixel sensor areas with a wiring layer comprising a stepped portion and a via contact portion that penetrates through the pad area of a substrate

Image sensor comprising a light shielding pattern with plural portions spaced apart on pixels of a sensor array area

Image sensor including planar boundary between optical black and active pixel sensor areas

A method of fabricating an image sensor device includes forming an insulating layer on a substrate including a photodiode therein, and forming a wiring structure on the insulating layer. The wiring structure includes at least one wiring layer and at least one insulating interlayer. A cavity is formed extending into the wiring structure over the photodiode to expose a surface of the at least one insulating interlayer. The surface of the at least one insulating interlayer exposed by the cavity is modified to define a hydrophobic surface. Related systems and devices are also discussed.

Image sensors including hydrophobic interfaces and methods of fabricating the same

An image sensor and a method for fabricating the image sensor are provided. The method for fabricating the image sensor includes forming a first insulating layer on a semiconductor epitaxial layer having multiple pixel regions; patterning a portion of the semiconductor epitaxial layer and the first insulating layer in a boundary region between the pixel regions to form a trench; forming a buried insulating layer on the first insulating layer, filling the trench, the buried insulating layer having a planar top surface; forming a second insulating layer on the buried insulating layer; forming a first mask pattern on the second insulating layer, the first mask pattern defining an opening overlapping the trench; and performing an ion implantation process using the first mask pattern as an ion implantation mask to form a first type potential barrier region in a bottom of the trench.

Image sensor and method of fabricating the same

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Seongnam-si, South Korea

Yu-jin Ahn