Taiwan Semiconductor Manufacturing Comp. Ltd.

Yu-Hsuan Huang

Pei-Hsuan Lee

Shang-Wei Fang

Yuan-Yao Chang

Ting-Hua Hsieh

Jing-Sen Wang

Wei-Ray Lin

Chien-Liang Chen

Chia-Chia Kan

In a semiconductor manufacturing method includes providing a plurality of patterns on a semiconductor substrate. The patterns include an NMOS structure arranged next to an N/N well structure, and/or a PMOS structure arranged next to a P/P well structure. The method further includes: receiving a plurality of images by applying an electron beam to the patterns; and transferring the semiconductor substrate to a next process step if there is no image conversion according to a predetermined image contrast property of the patterns.

In-line electrical detection of defects at wafer level

A method includes: coupling a first end of a first conductive trace to a free electron source; scanning exposed surfaces of the first and a second conductive traces with an electron beam, the first conductive trace and a second conductive trace being alternately arranged and spaced apart; obtaining an image of the first conductive trace and the second conductive trace while performing the scanning; and determining a routing characteristic of the first conductive trace and the second conductive trace based on the image.

Wafer-level testing method and test structure thereof

A method for inline inspection during semiconductor wafer fabrication is provided. The method includes forming a plurality of test structures on a semiconductor wafer along two opposite directions. An offset distance between a sample feature and a target feature of each of the test structures increases gradually along the two opposite directions. The method further includes producing an image of the test structures. The method also includes performing image analysis of the image to recognize a position with an extreme of a gray level. In addition, the method includes calculating an overlay error according to the recognized position.

Overlay error and process window metrology

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Taichung, Taiwan

Yu-Hsuan Huang